Design and Simulation of a MEMS-Based Flow Sensor Using COMSOL Multiphysics® Software

P. Saikumar [1], Z. C. Alex [1], D. Rajapan [2],
[1] VIT University, Vellore, Tamilnadu, India.
[2] National Institute of Ocean Technology (NIOT), Pallikaranai, Chennai, Tamilnadu, India

A flow sensor based on calorimetric principle is designed using COMSOL Multiphysics® software. The sensor is capable of measuring the velocity from 0 to 1 m/s with a resolution of 0.001m/s. The system works with intrusive type mechanism in which the fluid flows across the sensor and interacts with heating element and sensing unit. Temperature gradient measured across the inlet and outlet sensing units used as a parameter to calculate the flow rate and velocity of the fluid profile by solving Navier-Stokes equation. Conjugate heat transfer interface and fluid dynamics based mesh are used as special cases for this study purpose.