MEMS Device Simulation for Innovation
Engineers and researchers working with microelectromechanical system (MEMS) devices benefit from incorporating the COMSOL Multiphysics® simulation software into their workflow.
The COMSOL Multiphysics® software features a consistent user experience, regardless of engineering application and physics phenomena. By adding the MEMS Module, engineers can analyze MEMS devices and a variety of multiphysics interactions.
Real-World MEMS Device Simulation Examples
Resonators
Texas Instruments use simulation to analyze MEMS resonators for use in internet of things (IoT) connected and sub-GHz devices.
Phase Shifters
Researchers at EPFL designed a small-footprint silicon photonic MEMS phase shifter.
Piezoelectric Sensors
A research team used multiphysics modeling to characterize piezoelectric sensors used in acoustical nondestructive testing of materials and products.
Actuators
A team at Nanotechnology Research Center used simulation to design a low-voltage deformable mirror system for use in a large telescope.