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To model an electromagnetic MEMS
Posted Jan 30, 2025, 12:04 a.m. EST Electromagnetics, MEMS & Piezoelectric Devices, Modeling Workflow 0 Replies
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Fellow forum members,
I am working on modeling an electromagnetic MEMS-based 1D scanning mirror (image attached) that operates using copper coils for actuation. My goal is to simulate the physics behind this system to determine:
- Whether it can achieve the desired scan speed
- The mirror’s displacement for a given current input.
- The mirror's deformation for the scan speed.
- Variations in the scanning path due to the structural shape of the MEMS.
As I am new to COMSOL, I would appreciate your insights on whether this is the right platform to achieve these objectives. If so, where should I start?
I have watched some informative videos in the Learning Center on thermal actuators, and I strongly believe that COMSOL has the necessary capabilities for this type of modeling. However, I am looking for a stepping stone—such as an example, a relevant article, or a structured guide, specifically electromagnetic mems —to help me get started.
Any help in this regard would be greatly appreciated. Thank you for your time!
Best regards,
Hello Navaneeth M N
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