2D Simulations and Electro-Thermal Analysis of Microheater Designs using COMSOL for Gas Sensor Applications

G. Velmathi, N. Ramshanker, and S. Mohan
Department of Instrumentation, Indian Institute of Science, Bangalore, Karnataka, India

Microheaters have been widely investigated because of their extensive applications in gas sensors, flow rate sensors and other Microsystems. The geometric optimization for the microheater was performed by simulating a wide range of possible geometries using COMSOL Multiphysics, a commercial Finite Element Analysis (FEA) package. The simulated results of Microheaters having an improved temperature distribution over the sensing area and a higher density of integration are presented in this paper. The micro-heaters are designed to ensure low power consumption, low thermal mass and better temperature uniformity. In this paper we have presented six different patterns of microheater like Plane plate with central square hole, Double spiral, Honey comb, S- shape, fan shape and meander type with their Electro thermal simulated temperature profile. For the same supply voltage applied, the uniform temperature profile and the power consumption of the heater to get 400oC is analyzed for all the six patterns and compared.