Design and Analysis of Multilayered MEMS Microphone Using COMSOL Multiphysics®

Saranya srinivasa raghavgan[1], Sowmya Srinivasa raghavan[1], Shruti Venkatesh[1]
[1]Rajalakshmi Engineering College, Chennai, India

In this project, we report a design of MEMS microphone that is based on the application of porous silicon in improving the sensitivity of bulk micro machined capacitive pressure sensors. The property of a low Young’s modulus of porous silicon and its dependence on porosity have been exploited to obtain a higher sensitivity compared to pressure sensors with single crystalline silicon membranes. The behavior of this membrane was studied for various values of porosity and thickness of the porous silicon layer the sensitivity of the composite silicon/porous silicon membrane is found to be higher showing improvement with an increase in the porosity and thickness of the porous silicon layer. Various designs are carried out and detailed analyses of the designs are made.