Effect of Mass Adsorption on a Resonant NEMS

J. J. Ruz Martinez
Instituto de Microelectronica de Madrid
Tres Cantos
Madrid, Spain

The motion of a resonant NEMS has been widely studied for many different applications such as structural mechanics in engineering, ultra sensitive mass spectrometers or the well known Atomic Force Microscope. The study of the eigenfrequencies of such structures is very important, and nowadays there are good theoretical methods to accurately predict such eigenfrequencies.

When a little mass is deposited on the system, its natural frequencies change depending on the physical properties of the deposited mass and these changes are not completely well understood as the current theories are not capable of predicting them accurately. This is very important for nanomechanical mass sensors based on the frequency shifts of resonant structures such as nanowires or microcantilevers.