Modeling and Simulation of Silicon Optical MEMS Switches Controlled by Electrostatic Field

J. Golebiowski[1], S. Milcarz[1]
[1]Technical University of Lodz, Poland

The use of optical sensors in the industry is still growing. A transmission of signal from the sensors is mostly done by optical fibers. Switching the signals from optical paths may be done by using micromechanical silicon switches. The main advantage is an ability to transmit data from many sensors using different wavelengths, simultaneously minimizing optical power losses. A silicon beam with an Al layer is an actuating element. It is a mirror and an electrode of an electrostatic actuator at the same time. The second electrode is placed under the beam. A change in the electrostatic field causes a deflection of the beam.