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Modeling Mechanical Deformation and Optical Waveguiding Properties of Ion-Implanted Diamond

F. Bosia[1], P. Olivero[2], and E. Vittone[2]
[1]Dipartimento di Fisica Teorica, Università di Torino, Torino, Italy
[2]Dipartimento di Fisica Sperimentale, Università di Torino, Torino, Italy

Ion implantation in insulating materials leads to local variations in mechanical and optical properties that can be exploited for the fabrication of micro-structures. In particular, ion irradiation of diamond causes the formation of buried amorphised layers, with correspondent mass density and refractive index variations that depend on the level of “damage” of the crystal structure. For low damage levels, the damaged layer retains its optical transparency and waveguiding structures can be fabricated. In this study, we perform simulations to verify the number and type of propagating modes in such a waveguide, as a function of geometry and refractive index variation. At the same time, surface deformation and internal strains due to the buried damaged layer expansion are analysed.