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Numerical Analysis of the 3-omega-method

M. Feuchter, and M. Kamlah
Karlsruhe Institute of Technology (KIT)
Institute for Applied Materials
Karlsruhe, Germany

Determining the thermal conductivity of condensed matter attracted much attention in past years. While several techniques exist to measure the thermal conductivity of solids or thin films, the 3-omega-method is one of the most well-established due to its high accuracy.

First, COMSOL Multiphysics is used for numerical analysis to perform various parametric studies. To study the flow of heat, the mathematic interface is used in the general form of the partial differential equation (PDE(g)) to solve the heat conduction equation in the time domain for two and three dimensions.