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Numerical Simulation of Si Nanosecond Laser Annealing by COMSOL Multiphysics

M. Darif, and N. Semmar
GREMI-UMR6606, CNRS-Universite d’Orleans, Orléans, France

A 2D transient heat conduction model was created in COMSOL Multiphysics to simulate temperature changes in material irradiated by a KrF laser beam confined on silicon’s surface.

In this paper, the obtained results are shown and discussed in case of bulk Silicon. The heat source is distributed in time with ‘gate’ and ‘gaussian’ shapes. The thermal properties values obtained, in case of 'gate' shape, were compared with those obtained in case of ‘gaussian’ shape.

The returned result concerns surface temperature versus time and laser fluence.