Numerical Study of the Electrical Properties of Insulating Thin Films Deposited on a Conductive Substrate

R.A.Gerhardt[1], and S. Kumar[1]
[1]School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia, USA

Parametric finite element simulations were performed to study the effect of film thickness, and electrode size on the different impedance parameters for insulating thin films deposited on a conductive substrate. COMSOL Multiphysics® was used to solve the quasi-static form of Maxwell’s electromagnetic equations in time harmonic mode. Several types of 2D models (linear and axisymmetric) were considered. The full model dealt with a configuration in which the impedance is measured between two electrodes deposited on top of the films.