Radiofrequency Inductive Coupled Plasmas Towards Low Pressure

M. Cavenago
Laboratori Nazionali di Legnaro
INFN
Legnaro, Italy

Inductively coupled plasmas (ICP) are largely used as a convenient way to produce large ion currents in industrial applications and for particle accelerators and for the Neutral Beam Injectors (NBI) envisioned for tokamak heating (ITER project and beyond). Among specifications we have operation with gas pressure as low as possible (0.3 Pa).

A multiphysics model of some major processes is here described, including a 2D axisymmetric geometry, the transferral of power from rf to electrons, the transport of density ne and temperature Te of these electrons and a static magnetic field Bs applied to the plasma.

Download