Lithography-Patterning-Fidelity-Aware Electron-Optical System Design Optimization by Using COMSOL Multiphysics with MATLAB®
Sheng-Yung Chen , Kuen-Yu Tsai 
Dept. of Electrical Engineering, National Taiwan University, Taipei, Taiwan
Electron-optical system (EOS) design for lithography provides the inherent advantage of higher resolution and maskless operation relative to optical technology. The use of multiple electron beams yields higher throughput, albeit with greater complexity in focusing, relative to the single beam. The primary goal of this work is to develop equipment, process, and software technologies for MEMS-based ...
H.K. Yang, S.C. Tseng
Institute of Mechanical Engineering, National Yunlin University of Science Technology, Taiwan
In order to perform rust surface treatment for stainless wires, we proposed an electrolyzing equipment to do so. It has the following advantages: safer, cheaper and less environmental pollution. To study the performance of the electrolyzing process, numerical simulation for electric fields will be conducted by using COMSOL Multiphysics software. Taguchi methods was also used to obtain better ...
Dr. Meen-Wah Gui
Department of Civil Engineering, National Taipei University of Technology, Taipei, Taiwan
In this work, COMSOL Multiphysics was used to develop a model to investigate the degree of saturation in sloped terrain. The model was validated via laboratory experiments incorporating Lan’s man-made rainfall slope model test. The validated model was used in an actual case study to simulate the Maokong Landslide.
Department of Mechanical Engineering, Kun Shan University of Technology, Tainan, Taiwan
Multiphysics simulation has been used extensively in our research for fluid flow and heat transfer applications. Our projects include: simulation of fluid dynamics in an active liquid heat sink for CPU cooling, impeller design for a pipe flow generator with computational fluid dynamics (CFD), investment casting with plastic rapid prototype patterns, phase change materials with rapid prototyping ...
Cheng-Che (Jerry) Hsu
Department of Chemical Engineering, National Taiwan University, Taipei, Taiwan
Multiphysics simulation was used in this work to model inductively coupled plasmas (ICPs). Developing a model of an ICP is challenging due to the complex relationship between the applied electric field and mixture of chemical species that develops. A preliminary model was developed and validated for an Ar/O2 plasma including neutral, ionic, and all major reactions. The validated model was used to ...
Renewable Energy RD Center, Chung-Hsin Electric & Machinery, Taiwan
Proton exchange membrane fuel cells (PEMFCs) were investigated using COMSOL Multiphysics with the AC/DC Module and Chemical Engineering Module. Simulation may be used to increase the performance while decreasing the cost of the catalyst later (CL). Experimental validation of single and multi-layer CL was performed for varied PBI electrolyte content. The validated model was used to investigate the ...