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Multiphysics modeling and simulation drives innovation across industries and academia — as is evidenced by the many uses showcased in the technical papers and posters presented by engineers, researchers, and scientists at the COMSOL Conference each year.

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MEMS and Nanotechnology

Motion of Uncharged Particles in Electroosmotic Flow through a Wavy Cylindrical Channel

N. Qudus[1], T. Mahbub[1], S. A. Ali[1], and M. Shajahan[1]
[1] Bangladesh University of Engineering and Technology, Dhaka Bangladesh

A finite element model is employed to describe the electric potential distribution and electroosmotic flow field inside a wavy cylindrical channel. The model uses coupled Laplace and Poisson-Boltzmann to evaluate the electric potential distribution inside the channel. It also contains ... Read More

Numerical Investigation of Electroosmotic Flow in Convergent Divergent Micronozzle

V. Gnanaraj[1], V. Mohan[1], and B. Vellaikannan[1]
[1]Thiagarajar College of Engineering, Madurai, Tamilnadu, India

A fundamental understanding of the transport phenomena in microfluidic channels is critical for systematic design and precise control of such miniaturized devices towards the integration and automation of Lab-on- a-chip devices. Electroosmotic flow is widely used to transport and mix ... Read More

FEM Study on Contactless Excitation of Acoustic Waves in SAWDevices

A. K. Namdeo[1], N. Ramakrishna[2], H. B. Nemade[1,2], and R. P. Palathinkal[1]

[1] Department of Electronics and Communication Engineering, Indian Institute of Technology Guwahati, Assam, India
[2] Centre for Nanotechnology. Indian Institute of Technology Guwahati, Assam, India

In this paper a finite element method(FEM) study of a surface acoustic wave (SAW)device excited by electrostatic coupling method is performed by using COMSOL Multiphysics. We have modeled a Rayleigh wave type SAW device by choosing YZ Lithium niobate as the substrate. The effect of ... Read More

Design and Optimization of an All Optically Driven Phase Correction MEMS Deformable Mirror Device using Finite Element Analysis

V. Mathur[1], K. Anglin[1], V.S. Prasher[1], K. Termkoa[1], S.R. Vangala[1], X. Qian[1], J. Sherwood[1], W.D. Goodhue[1], B. Haji-Saeed[2], and J. Khoury[2]

[1]Photonics Center, University of Massachusetts-Lowell, Lowell, Massachusetts, USA
[2]Air Force Research Laboratory/Sensors Directorate, Hanscom Air Force Base, Massachusetts, USA

Optically addressable MEMS mirrors are required for future high density adaptive optics array systems. We have demonstrated a novel technique of achieving this by actuating low stress Silicon Nitride micro mirrors via cascaded wafer bonded Gallium Arsenide photo detectors on Gallium ... Read More

Optimization of Carbon Nanotube Field Emission Arrays

B. L. Crossley[1], M. Kossler[1], P.J. Collins[1], R. A. Coutu Jr.[1], and L. A. Starman[1]

[1]Air Force Institute of Technology, Wright-Patterson AFB, Ohio, USA

Carbon nanotubes (CNTs) have been proven experimentally to be well suited for field emission applications. An optimized triode configured CNT field emission array is developed using the COMSOL Multiphysics Electrostatics Application to adjust five key physical dimensions to investigate ... Read More

The Fabrication of a New Actuator Based on the Flexoelectric Effect

S. Baskaran[1], S. Thiruvannamalai[1], N. Ramachandran[1], F.M. Sebastian[1], and J.Y. Fu[1]
[1]State University of New York at Buffalo, Buffalo, New York, USA

This paper presents a novel methodology towards the design, analysis, and the fabrication process involved in developing a cost effective method to create a piezoelectric actuator by means of the flexoelectric effect. The basic physical equations of the flexoelectric effect and the ... Read More

Multiphysics Simulation of the Effect of Sensing and Spacer Layers on SAW Velocity

P. Zheng[1,4], D.W. Greve[2,4], and I.J. Oppenheim[3,4]

[1]Department of Physics, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA
[2]Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA
[3]Department of Civil and Environmental Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA
[4]National Energy Technology Laboratory, Pittsburgh, Pennsylvania, USA

Surface acoustic wave gas sensors use a chemically sensitive resistive layer to detect gas concentration. The resistivity of the sensing material, the sensing layer thickness, and the spacer layer thickness all affect the surface wave propagation velocity. Existing analytic theory ... Read More

The Origin of Mass-change Sensitivity within Multi-layered, Non-uniform, Piezoelectrically-actuated Millimeter-sized Cantilever (PEMC) Biosensors: Vibrational Analysis through Experiment and Finite Element Modeling (FEM)

B.N. Johnson[1], and R. Mutharasan[1]

[1]Department of Chemical and Biological Engineering, Drexel University, Philadelphia, Pennsylvania, USA

A 3D finite element model (FEM) of the PEMC sensor was developed to characterize the modes of vibration that have demonstrated high sensitivity to mass-change in experimentally fabricated sensors. The fundamental bending mode of vibration and the 1st bending harmonic are predicted at 10 ... Read More

Nanoscale Heat Transfer using Phonon Boltzmann Transport Equation

S. Sihn[1,2], and A.K. Roy[2]

[1]Air Force Research Laboratory, Wright-Patterson Air Force Base, Dayton, Ohio, USA
[2]University of Dayton Research Institute, Dayton, Ohio, USA

COMSOL Multiphysics was used to solve a phonon Boltzmann transport equation (BTE) for nanoscale heat transport problems. One dimensional steady-state and transient BTE problems were successfully solved based on finite element and discrete ordinate methods for spatial and angular ... Read More

COMSOL Multiphysics Modeling of Rotational Resonant MEMS Sensors with Electrothermal Drive

S. Nelson[1], and M. Guvench[1]
[1]University of Southern Maine, Gorham, Maine, USA

COMSOL Multiphysics is employed to model, simulate and predict the performance of a high Q, in-plane rotational resonating MEMS sensor. The resonating sensor disk is driven by thermal expansion and contraction of the support tethers due to AC joule heating. The resonant frequency is ... Read More

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