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COMSOL Multiphysics®

Products > Specification Chart > Plasma

Specification Chart

Physics Interfaces and Study Types

Boltzmann Equation, Two-term Approximation

Yes

Capacitively Coupled Plasma

Yes

DC Discharge

Yes

Drift Diffusion

Yes

Heavy Species Transport

Yes

Inductively Coupled Plasma*

Yes

Yes

Microwave Plasma*

Yes

Yes

Boundary Conditions

Electrons

Yes

Heavy Species

Yes

Discretization

Finite Element

Yes

Finite Volume

Yes

Volumetric Domain Properties

1D, 2D, Axisymmetric, and 3D Formulations

Yes

Collisionless Heating

Yes

Drift Diffusion Model

Yes

Electron Production Rate

Yes

General Power Deposition

Yes

Inductive Power Deposition

Yes

Microwave Power Deposition

Yes

Reaction

Yes

Species, Non-Electron

Yes

Electron Energy Distribution Function

Yes

Electron Impact Reaction

Yes

Diffusion-Models for Heavy Species Transport

Fick's Law

Yes

Mixture-Averaged

Yes

* = Requires all indicated products