Biased Resonator Models (3D)
Model ID: 11748
An electrostatically actuated MEMS resonator is simulated in the time and frequency domains. The device is driven by an AC + DC bias voltage applied across a parallel plate capacitor. The dependence of the resonant frequency on DC bias is assessed, and frequency domain and transient analyses are performed to investigate the device performance.
|Stress (volume plot) and Electric potential (iso-surfaces) for a clamped-clamped beam with an applied DC bias. Since the model is symmetric only half of the beam is shown.|