Model ID: 2112
Copper Deposition in a Trench
The model makes use of the Nernst-Planck application mode in combination with a Moving Mesh (ALE) application mode to keep track of the deformation of the mesh. Furthermore, electrochemical reaction kinetics through use of the Butler-Volmer equation for copper deposition are freely entered at the boundaries.
The model is inherently time-dependent and results clearly show that the mouth of the trench narrows, due to non-uniform deposition of the copper. In addition, the simulation shows a substantial variation in copper ion concentration along the length of the trench. Such effects can be detrimental to the quality of the deposition, creating corrosion possibilities, and also lead to material waste.
