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MEMS

Posted Sep 14, 2012, 4:35 p.m. EDT Version 4.2, Version 4.3b 2 Replies

Sudhaman Parthasarathi
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How can i compute the displacement due to gravity in a silicon proof mass in accelerometer and therefore i need to compute the change in capacitance in the accelerometer. My basic question is how do i apply force on a silicon block and compute the displacement.
2 Replies Last Post Aug 16, 2013, 1:14 p.m. EDT
Ivar KJELBERG COMSOL Multiphysics(r) fan, retired, former "Senior Expert" at CSEM SA (CH)
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Posted: 1 decade ago Sep 15, 2012, 5:37 a.m. EDT
Hi

if you run a "solid" physics of a geoemtrical system, that is attached by some means to block all free DoFs 3 in 2D, 6 in 3D and then apply a body load (rho*g_const) [N/m^3] or a boundary load [N/m^2] then you should see the deflection.

To get a capacitive change you need one of the ACDC modules and couple the deformation to a squeezing of the air/vacuum region between your electrodes, thiswill give you a change in geometry hence a change in capacitance.

There are several models in the model lbrary and on the Forum

--
Good luck
Ivar
Hi if you run a "solid" physics of a geoemtrical system, that is attached by some means to block all free DoFs 3 in 2D, 6 in 3D and then apply a body load (rho*g_const) [N/m^3] or a boundary load [N/m^2] then you should see the deflection. To get a capacitive change you need one of the ACDC modules and couple the deformation to a squeezing of the air/vacuum region between your electrodes, thiswill give you a change in geometry hence a change in capacitance. There are several models in the model lbrary and on the Forum -- Good luck Ivar
Yongkang Tao
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Posted: 1 decade ago Aug 16, 2013, 1:14 p.m. EDT
what if there're several kind of materials in the model ? How can I apply acceleration on the whole model ?
what if there're several kind of materials in the model ? How can I apply acceleration on the whole model ?

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