Capacitive Micromachined Ultrasonic Transducer — GDS Import
Application ID: 151381
This tutorial demonstrates how to import a GDS file to model a capacitive micromachined ultrasonic transducer (CMUT). It shows how to define the layer stackup by modifying layer thicknesses and elevations, and how to use the automatically generated layer and cell selections. The imported layout is then developed into a complete 3D device geometry using a sequence of operations that reflects the physical fabrication process, followed by an eigenfrequency analysis.
This model example illustrates applications of this type that would nominally be built using the following products:
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
- COMSOL Multiphysics® and
- ECAD Import Module and
- either the Acoustics Module, MEMS Module, Multibody Dynamics Module, or Structural Mechanics Module
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Specification Chart and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.
