Model of a CF4/O2 Inductively Coupled Plasma Reactor
Application ID: 141141
This tutorial model solves for an inductively coupled plasma reactor in a mixture of CF4/O2. The plasma transport, magnetic fields, fluid flow, and heat transfer are solved for fully self-consistently. The oxygen mole fraction of the reactor feed is parameterized.
This model example illustrates applications of this type that would nominally be built using the following products:
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Specification Chart and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.