B. D. Hauer, C. Doolin, K. S. D. Beach, J. P. Davis
University of Alberta, Edmonton, AB, Canada
Over the past few decades, nano/micro-mechanical resonators have experienced tremendous improvements in measurement sensitivity. In order to ensure accuracy, it is crucial that each nano/micro-mechanical device is properly calibrated. Thermomechanical calibration provides a noninvasive calibration method by which scaling issues can be circumvented. Each resonator is modeled as a damped harmonic ...
N. Gouthami, D. Parthiban, M. Alagappan, and G. Anju
PSG College of Technology
Tamil Nadu, India
The objective of this paper is to design a 3D Gas Sensor for sensing Hydrogen gas and to increase the conductivity at nano level. In this novel design, nanorods act as the sensing layer. The sensitivity towards gas adsorption is found to be increased due to its high surface to volume ratio. The total displacement and voltage on intermediate layer after gas adsorption will be changing by varying ...
Design and Analysis of Micro-Heaters for Temperature Optimization using COMSOL Multiphysics for MEMS Based Gas Sensor
V. S. Selvakumar, L. Sujatha
Rajalakhmi Engineering College, Chennai, Tamil Nadu, India
Micro-Heaters are the key components in sub-miniature micro-sensors, especially in gas sensors. The metal oxide gas sensors utilize the properties of surface adsorption to detect changes in resistance as a function of varying concentration of different gases . To detect the resistive changes, the heater temperature must be in the requisite temperature range over the heater area. Hence the ...
D. Mallick, and A. Bhattacharyya
Institute of Radio Physics and Electronics
University of Calcutta
West Bengal, India
Micromirror is a versatile MEMS device, which finds use in many application areas. In this paper, we have addressed the issues related to the design and behavioral simulation of MEMS based electro-thermal micromirror [Figure 1] for 3D motion. Two types of thermal actuation mechanism are used in the designed device. For in-plane movement poly-silicon made two-hot-arm actuatoris used. Here, the ...
VLSI Layout Based Design Optimization of a Piezoresistive MEMS Pressure Sensors using COMSOL Multiphysics
R. Komaragiri, Sarath. S., N. Kattabomman
NIT Calicut, Kozhikode, Kerala
This paper focuses on the diaphragm design and optimization of a piezoresistive Micro Electro Mechanical System (MEMS) pressure sensor by considering Very Large Scale Integration (VLSI) layout schemes. The aim of these studies is to find an optimal diaphragm shape by Finite Element Method (FEM) using COMSOL®, which is most suitable for VLSI layout. Optimal diaphragm shape is a diaphragm shape ...
A. Arevalo, I. G. Foulds
King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
The University of British Columbia, Vancouver, BC, Canada
A COMSOL Multiphysics® simulation was used to simulate the behavior of a micro-membrane (Acoustic Pixel) to be used as a potential acoustic transducer. The MEMS and Piezoelectric devices interfaces were used to simulate such transducer. A four-cantilever spring configuration is initially proposed. Each cantilever has a width of 30 µm and are connected to a central circular plate with a radius ...
N. Mahmoodi, C. J. Anthony
University of Birmingham, Birmingham, UK
Viscous damping has a significant effect on dynamic performance of the resonators operating within fluid. This work is aimed to find the viscous damping for MEMS torsional paddle operating in air. Interaction of moving structure with the fluid requires a complicated and challenging analysis. The Fluid-Structure Interaction interface of COMSOL Multiphysics® software is used to study the 2-D ...
A. Mulye, S. Potnis
Northeastern University, Boston, MA, USA
VIT, Mumbai, Maharashtra, India
We present an optimized and efficient design of an electrohydrodynamic (EHD) micropump for high performance in microscale and biological applications. We are targeting two major applications, a parylene C design for electrically-actuated medicine delivery, and a silicon-based pump design for on-chip cooling of microprocessors and SOCs. The EHD micropump works on the movement of microscale ...
M. S. Virk, A. E. Holdø, and S. Kaennakham
Energy & Environmental Technology Applied Research Group, Faculty of Engineering and Computing, Coventry University, Coventry, UK
Microfluidic systems hold promise for many novel applications where rapid mixing is important, and has lead to a number of new developments. Despite such major developments, no systematic study has been carried out to understand the effect of flow mechanisms and geometry on microfluidic mixing. This work focuses on a mixing analysis of low Reynolds number (< 25) microfluids in a T-shaped passive ...
M. Christian, S. Firebaugh, A. Smith
United States Naval Academy, Annapolis, MD, USA
This project utilizes the heat transfer module of the COMSOL Multiphysics environment to model the effects that an ohmic heating probe will have on neural tissue. The model quantifies the thermal impact of active components embedded on a neural micro probe by solving the Penne’s bioheat equation with an external MATLAB function to determine the heat generation along the length of the probe. ...