A component used in RF-MEMS systems is the electrostatically actuated shunt switch. We show how this type of switch can be simulated using a simple mechanical FEMLAB model where electrostatic forces are modelled by a pressure load. The static as well as dynamic properties of the switch are analysed, e.g. static pull in and pull out voltages and displacements, dynamic switch up and down times ...
A.F. Tabak, and S. Yesilyurt
Sabanci University, Istanbul, Turkey
Continuous forming and propagation of large planar deformations on a thin solid elastic film can create propulsion when the film is immersed in a fluid. In this work, we present a numerical analysis of the effect of traveling plane-wave deformations on an elastic-film actuator within a fluid medium inside a channel. In particular, we analyzed a micropump that consists of a wave actuator. ...
Pryor Knowledge Systems, Inc. (COMSOL Certified Consultant), Bloomfield Hills, Michigan, USA
Materials and their related properties are intrinsically fundamental to the creation, development and solution of viable exploratory models when using numerical analysis software. In many cases, simply determining the location, availability and relative accuracy of the necessary material parameters for the physical behavior of even commonly employed design materials can be very difficult and time ...
Optimization of the Temperature Distribution in a Chemical Microreactor using a Multi-Segment Integrated Thin Film Heater
T.R. Henriksen, S. Jensen, U. Quaade, and O. Hansen
Technical University of Denmark
COMSOL Multiphysics has been used to study the effect of different heater design parameters on the temperature distribution in a chemical microreactor. The primary objective of the simulations has been to optimize the temperature uniformity inside the reaction chamber. In the simulations, special attention has been given to how the number, positions and widths of the heater strips relate ...
Perspectives of Thermo-electro-mechanical Micro Actuators for Micro Switch Applications: Design and Simulation
M. Matmat, M. Al Ahmad, and J. Y. Fourniols
Laboratoire d'Analyse et d'Architecture des Systèmes (LAAS-CNRS), Toulouse, France
In this work, thermo-mechanical simulations employing a 3D finite element analysis (FEA) of a current driven V-shaped actuator is presented. The structure's hot arms consist of polysilicon, which was used as the active material for deflection due to the Joule effect.COMSOL Multiphysics with stationary and parametric solvers was used to calculate the resulting deflection when current is applied. ...
N. Al Cheikh, P. Xavier, J. Duchamp, and K. Schuster
Institute of Microelectronics, Electromagnetism and Photonics (IMEP-LAHC), Grenoble, France
Institute of Millimetrics Radio Astronomy (IRAM), Grenoble, France
Superconducting GHz electronics circuits are frequently used in Radio Astronomy instrumentation. The features of these instrumentations can be significantly improved by using tuneable capacitances, which can be realized by electrically actuated, micromechanical bridges (MEMS) made of superconducting Niobium (Nb). In order to analyze the electromechanical behavior of such devices and the intrinsic ...
Powerful automation and optimization methods for Material- and Process analysis with COMSOL Multiphysics and Matlab
SGL Group, Technology & Innovation, Meitingen, Germany
Thomas Frommelt received his PhD in physics in 2007 from the University of Augsburg for experimental work and simulation analysis on acoustically driven microfluidic mixing. In 2008, he joined the SGL Group and introduced COMSOL Multiphysics as the tool for flexible equation based modelling. Since then, he has focused on carbon material and process simulation employing methods of optimization and ...
University of Cambridge
This work presents a different use of COMSOL as an integrated component of a computational tool framework used to automate designs creation. CNS-Burst is a computational synthesis method that has been implemented with the aim of automatically generating solutions to an assigned design task. COMSOL is integrated in the method and used to evaluate the performance of the design solutions found. ...
A. Corigliano, A. Courard, G. Cocchetti, P. Gagliardi, L. Magagnin, R. Vallauri, D. Acconcia
Politecnico di Milano, Milano, Italy
Technoprobe, Cernusco Lombardone, Italy
The paper presents recent results concerning the experimental mechanical characterization, the numerical modeling and the design of micro-needles used in the construction of probe heads for wafer testing. A fully coupled electro-thermal model was created using COMSOL and combined to a research-oriented thermo-mechanical Finite Element (FE) code in order to accurately reproduce the micro-needle ...
Multiphysics Modeling and Simulation of MEMS based Variometer for Detecting the Vertical Speed of Aircraft in Avionics Applications
K. Umapathi, K. Sukirtha, C. Sujitha, K. A. Noushad, Venkateswaran, R. Poornima, R. Yogeswari
United Institute of Technology, Coimbatore, Tamil Nadu, India
Sri Krishna College of Engineering and Technology, Coimbatore, Tamil Nadu, India
The objective of this work is to develop a MEMS based Variometer to measure the vertical speed and to sense the instantaneous rate of climb or descent in Aircrafts to meet the miniaturization requirements in avionics industry. The design consists of dielectric material in between two micro electrodes. The micro diaphragm is placed on one of the electrode. As the aircraft changes altitude, the ...