Design and Simulation of A MEMS Based Horseshoe Shaped Low Current Lorentz Deformable Mirror (LCL-DM) - new
B. Park , T. Chen , C. Shafai ,
 Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB, Canada
This poster presents the design and analysis of a novel horseshoe shaped MEMS actuator for adaptive optics. The actuation mechanism is Lorentz force enabling low current (below 10 mA) operation. The actuator combined with an overlying aluminum coated SU-8 soft polymer membrane for the mirror, together form the complete adaptive optics system to enable correction of wavefront distortion of ...
A. Arevalo , D. Conchouso , D. Castro , M. Diaz , I. G. Foulds ,
 CEMSE Division, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
 Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
 University of British Columbia, Vancouver, BC, Canada
INTRODUCTION: Micro Electro Mechanical Systems (MEMS) are fabricated with an in-plane fabrication technology. Out-of-plane structures can be designed to be assembled to provide thermal and electrical isolation from the substrate [1 -3]. These isolations can potentially improve the performance of a range of MEMS devices by decreasing any unwanted coupling effects or parasitic losses from the ...
A. El Kacimi , E. Pauliac-Vaujour , J. Eymery 
 University Grenoble Alpes, CEA, LETI, MINATEC Campus, Grenoble, France
 University Grenoble Alpes, CEA, Grenoble, France
We report on the modeling of flexible piezoelectric capacitive sensor based on GaN wires grown by Metal Organic Vapor Phase Epitaxy. Single crystal cone-shaped wires with hexagonal cross section are embedded within dielectric layers (parylene) in between two metal electrodes to achieve a capacitive structure. The device characteristics directly depend on growth conditions for example by tuning ...
Primary Current Distribution Model for Electrochemical Etching of Silicon through a Circular Opening - new
A. Ivanov , U. Mescheder ,
 Hochschule Furtwangen University, Furtwangen im Schwarzwald, Germany
Primary current distribution model for anodization of low-doped p-type silicon through a circular opening in frontside insulating mask is developed. The model is applied in two regimes of the process – pore formation and electropolishing – by definition of current density dependent functions of porosity and dissolution valence based on experimental results. As found also experimentally, ...
A. Arevalo , J. Prieto , M. M. Hussain , I. G. Foulds ,
 Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
 The University of British Columbia, School of Engineering, Vancouver, BC, Canada
The role of stretchable electronics systems allows the design of new reconfigurable macro-electronics, that extends a device capability to function as a distributed sensor network which can potentially be used for wearable electronics. At the moment such devices are primarily based on polymeric materials such as PDMS or Polyimide. Nevertheless, silicon has been the predominant material in ...
A. Arevalo , J. P. Rojas , D. Conchouso , M. M. Hussain , I. G. Foulds 
 Computer, Electrical and Mathematical Sciences and Engineering (CEMSE), King Abdullah University of Science and Technology (KAUST), Thuwal, Saudi Arabia
 The University of British Columbia, School of Engineering, Okanagan Campus, Canada
Energy efficiency and harvest, speed and performance, flexibility and portability are key elements for innovation in the current consumer electronics markets. Thermoelectric Generators can convert energy from heat gradients into electricity. Every source of heat from an electronics device can potentially be used as a source of energy. This generators have the advantage of: being silent, compact, ...
A. T. Galisultanov , P. Le Moal , V. Walter , G. Bourbon ,
 FEMTO-ST, Besanson, France
During last twenty years capacitive micromachined ultrasonic transducers (CMUT) have been developed extremely fast [1-2]. CMUT is an attractive alternative to traditional piezoelectric transducer, which converts electrical signal to mechanical vibration and vice versa. The main advantages of CMUT compared to most common solution: wide bandwidth (improved image resolution) and compatibility with ...
COMSOL Multiphysics® Software Simulation of a Dual-axis MEMS Accelerometer with T-Shaped Beams - new
C. Zheng , X. Xiong , J. Hu 
 Department of Electrical and Computer Engineering, University of Bridgeport, Bridgeport, CT, USA
 Department of Mechanical Engineering, University of Bridgeport, Bridgeport, CT, USA
Introduction: Inertial navigation requires acceleration measurement along all three degree-of-freedoms. Most accelerometers are designed to measure acceleration along a single sensitive direction. For complete inertial sensing, a move effective accelerometer which can sense acceleration along multiple axes is needed. In this research, a dual-axis MEMS (Microelectromechanical Systems) ...
Simulation of the Impedance Response of Thin Films as a Function of Film Conductivity and Thickness - new
Y. Jin , S. Kumar , R. A. Gerhardt ,
 School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA, USA
1. Introduction The electrical properties of materials are important in many different applications. In microelectronics for example, films must perform as insulators, semiconductor or as conducting layers. In recent years, scanning probe methods are being extended to the nanometre scale range since accurate high spatial resolution measurements of electrical properties are of great interest ...
J. Liu , V. B. Chalivendra , C. Goldsmith , W. Huang ,
 Department of Mechanical Engineering, University of Massachusetts - Dartmouth, Dartmouth, MA, USA
 MEMtronics Corporation, Richardson, TX, USA
Radio frequency (RF) micro-electro mechanical system(MEMS) switch works in on/off modes controlled by electrostatic forces. In off mode, rough surfaces of electrodes come into a contact to shunt the RF signal. Surface contact area has been recognized as a key factor in RF MEMS performance and reliability. Multi scale regular-fractal structure is observed on MEMS surface. Nonlinear Structural ...