COMSOL Day: Micro- and Nanotechnology

Multiphysics modeling is widely used in micro- and nanotechnology, where interactions between electrical, mechanical, thermal, fluidic, optical, and chemical effects often determine device performance. Simulation supports the analysis and design of systems involving microfluidics, MEMS, photonics, semiconductors, and other microscale and nanoscale technologies.

This introductory session will provide an overview of how multiphysics simulation is used for the analysis, design, and optimization of micro- and nanosystems. Application examples from several areas of physics will be presented, together with examples of optimization, uncertainty quantification, surrogate modeling, and simulation apps. The session will also provide an overview of the topics that will be covered during this COMSOL Day.

COMSOL Multiphysics^® is widely used for modeling and simulation of microfluidic systems in applications such as healthcare and biotechnology, consumer electronics, and environmental monitoring.

The software supports analysis of microfluidic devices involving coupled physical effects, including fluid–structure interaction, electromechanics, electrothermal effects, piezoelectricity, electrokinetics, chemical reactions, and multiphase flow.

This session will provide an overview of microfluidics modeling in COMSOL Multiphysics^®, with application examples including micromixers, BioMEMS, inkjet devices, and gas sensors and will also demonstrate how multiphysics simulation supports device analysis, development, and optimization.

Microelectromechanical systems (MEMS) integrate mechanical and electrical components at the microscale. The COMSOL Multiphysics^® software supports modeling of the coupled physical effects often found in MEMS devices, including electrostatics, structural mechanics, piezoelectricity, electrothermal effects, fluid–structure interaction, hygroscopic swelling, squeeze-film damping, and magnetostriction.

This session will provide an overview of MEMS modeling in COMSOL Multiphysics^®, with application examples including accelerometers, gyroscopes, pressure sensors, oscillators, and resonators.

Modeling and simulation is widely used in photonics and optics to analyze light propagation, scattering, resonance phenomena, and wave interaction with materials. The COMSOL Multiphysics^® software supports coupled optical analyses involving electro-optical, thermo-optical, stress-optical, and plasmonic effects in devices and systems used in communications, sensing, medical technology, and quantum applications.

In this session, we will provide an overview of optical modeling in COMSOL Multiphysics^®, with examples including nanoparticle scattering, photonic integrated circuits, surface plasmon polaritons, periodic metamaterial structures, metalenses, and microoptics.

Modeling and simulation is used throughout semiconductor manufacturing, from front-end process development to advanced packaging. The COMSOL Multiphysics^® software and its add-on modules support analysis of fabrication processes such as etching, doping, deposition, ion implantation, plasma processing, thermal annealing, and electrochemical processing.

The multiphysics framework enables coupled analysis of transport phenomena, chemical reactions, electromagnetic fields, heat transfer, and mechanical stresses, supporting realistic process modeling and packaging studies involving thermal management, nonlinear structural behavior, and electromigration.

Join this session for an overview of semiconductor process and packaging simulation in COMSOL Multiphysics^®, with examples from fabrication, thermal design, and reliability analysis.

Modeling and simulation is widely used in semiconductor and optoelectronic device development, enabling detailed analysis of charge transport, electromagnetic fields, heat transfer, and optical effects.

The Semiconductor Module add-on product extends COMSOL Multiphysics^® with functionality for modeling devices such as metal–oxide–semiconductor field-effect transistors (MOSFETs), fin field-effect transistors (FinFETs), memristors, solar cells, photodiodes, LEDs, and quantum dots. The module supports drift–diffusion analysis together with coupled thermal, optical, and electromagnetic effects, enabling self-consistent multiphysics modeling of semiconductor devices.

In this session, we will provide an overview of semiconductor modeling in COMSOL Multiphysics^® and highlight applications ranging from classical semiconductor devices to circuit quantum electrodynamics (circuit QED) systems for quantum technologies.