Multiphysics Analysis of a Micromirror System

N. Katte[1]
[1]Wilberforce University, USA
Published in 2019

The challenge of our current research is to design large aperture MEMS scanning mirrors for Light Detection and Ranging (LIDAR) applications such as in unmanned driving or Unmanned Aerial Vehicle. The current MEMS scanning mirrors have a smaller aperture which limits application, it can only deflect light at small angles. In this research we show how to engineer new designs for MEMS mirrors with larger aperture to increase the deflection angle while also maintaining an optimal scanning rate. We also show how these MEMS mirrors are incorporated in a wholistic optical design for practical systems.

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