Simulation of Interaction of Low-Temperature Plasma with Immersed Solids

V. Hrubý, and R. Hrach
Department of Surface and Plasma Science, Charles University, Prague, Czech Republic
Published in 2010

The computer simulation with COMSOL Multiphysics has become a widely used technique for the study of various problems in the field of plasma physics. Despite the increasing performance of computers, fully three-dimensional particle simulations still have got extremely high demands on hardware and computer time. Although many problems could be solved by fluid models, results obtained by these methods lack detailed information about individual particles. To overcome these difficulties, hybrid models combining several basic techniques have been introduced. The presented model allows us to solve complex problems demanding the three-dimensional geometry, such as interaction of low-temperature plasma with uneven substrates or plasma propagation to porous solids in the presence of magnetic field.

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