ASML Advances Photolithography Systems with Multiphysics Simulation
Fred Huizinga, ASML, Netherlands
At ASML, the development of cutting-edge computer chips and the machinery to produce them requires a complex understanding of the many coupled physical processes involved. To design machines at this level of precision requires simulation at every step, making the availability of a comprehensive simulation toolbox invaluable. For example, engineers at ASML worked on the design of an air bearing responsible for high-precision movements in photolithography machines. They also created simulation apps to allow colleagues throughout the team to virtually test the performance of different designs.
Suggested Stories
Designing Next-Generation CO2 Removal Technology for Better Life in Space
NASA combines thermal modeling and experimental testing to find the best compressor design for the system that keeps ...
Multiphysics Simulations Help Track Underground Fluid Movements
Combining acoustic and electromagnetic analyses helps scientists to more efficiently measure and survey subterranean ...
How Fast Do Elevated Temperatures Reach the Cell Interior?
Lithium-ion batteries, which have a tendency to degrade at high temperatures, must adhere to stringent regulations ...
From Nanoantennas to Deep Space Satellites, Electron Emission Enables Efficient Power Generation
Researchers from the Italian Institute of Technology (IIT) and the European Space Agency (ESA) are developing power ...
