Keynote: Simulation of MEMS Sensors at Bosch

In this keynote talk at the COMSOL Conference 2025 Amsterdam, Daniel Maier of Bosch discusses MEMS sensors and the importance of simulation in their development.

Maier gives an overview of Bosch's products and MEMS sensors and actuators, which are miniature microelectromechanical systems that combine tiny mechanical structures with electronic circuits for the automotive, consumer/gaming, medical, and aerospace industries. He explains how accurate predictions of key performance indicators are crucial for strong performance, high quality, and a high manufacturing yield, leading to a competitive product. The company uses COMSOL Multiphysics^® to model and simulate effects from multiple physical domains, such as structural mechanics, fluid dynamics, and electrodynamics. The talk concludes by highlighting several examples from the fields of acoustical and environmental sensors, including a MEMS microspeaker and a hydrogen gas sensor.

Daniel Maier is a senior MEMS designer and simulation expert at Bosch in Germany.