The Application Gallery features COMSOL Multiphysics® tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical disciplines. You can use these examples as a starting point for your own simulation work by downloading the tutorial model or demo app file and its accompanying instructions.
Search for tutorials and apps relevant to your area of expertise via the Quick Search feature. Note that many of the examples featured here can also be accessed via the Application Libraries that are built into the COMSOL Multiphysics® software and available from the File menu.
This tutorial demonstrates how an electrical circuit model of a MEMS resonator can be derived using the Parameter Estimation feature. The model is a modified Butterworth-Van Dyke circuit created using the Electrical Circuit interface and represents a Thin-Film Bulk Acoustic Resonator ... Read More
This model shows how to simulate a capacitively actuated surface micromachined accelerometer, using the Electromechanics Interface. It is based on a case study from the book Microsystem Design by Stephen D. Senturia (Kluwer Academic Publishers, 5th Edition, 2003, pages 513-525). Read More
A solidly-mounted resonator (SMR) is a piezoelectric MEMS resonator formed on top of an acoustic mirror stack deposited on a thick substrate. This tutorial shows how to simulate an SMR in 3D. In this example, the eigenmodes were computed with varying number of particles attached to the ... Read More
This model shows how to analyze a tuning fork based piezoelectric rate gyroscope. The reverse piezoelectric effect is used to drive an in-plane tuning fork mode. This mode is coupled to an out of plane mode by the Coriolis force and the resulting out of plane motion is sensed by the ... Read More
Many piezoelectric materials are ferroelectric. Ferroelectric materials exhibit nonlinear polarization behavior, such as hysteresis and saturation at large applied electric fields. In addition, the polarization and mechanical deformations in such materials can be strongly coupled due to ... Read More
A capacitive pressure sensor is simulated. This model shows how to simulate the response of the pressure sensor to an applied pressure, and also how to analyze the effects of packing induced stresses on the sensor performance. Read More
Piezoresistive pressure sensors were some of the first MEMS devices to be commercialized. Compared to capacitive pressure sensors, they are simpler to integrate with electronics, their response is more linear and they are inherently shielded from RF noise. They do, however, usually ... Read More
This tutorial example is kindly provided by Dr. James Ransley at Veryst Engineering, LLC. This model continues from the base model “A Micromachined Comb-Drive Tuning Fork Rate Gyroscope”, which is also provided by Dr. Ransley. The model demonstrates how to accurately compute the effects ... Read More
The model performs a static analysis on a piezoelectric actuator based on the movement of a cantilever beam, using the Piezoelectric Devices predefined multiphysics interface. Inspired by work done by V. Piefort and A. Benjeddou, it models a sandwich beam using the shear mode of the ... Read More
This tutorial demonstrates the operation of a gyroscope based on design provided by Dr. James Ransley at Veryst Engineering, LLC. The model uses the Electromechanics coupling with the mixed finite element formulation in the Electrostatics interface. Read More
