The Application Gallery features COMSOL Multiphysics® tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical disciplines. You can use these examples as a starting point for your own simulation work by downloading the tutorial model or demo app file and its accompanying instructions.
Search for tutorials and apps relevant to your area of expertise via the Quick Search feature. Note that many of the examples featured here can also be accessed via the Application Libraries that are built into the COMSOL Multiphysics® software and available from the File menu.
This model simulates an electrodeless lamp with argon/mercury chemistry. The low excitation threshold for mercury atoms means that even though the mercury is present in small concentrations, its behavior dominates. There is strong UV emission from the plasma at 185 nm and 253 nm. The UV ... Read More
Plasma discharges containing chlorine are commonly used to etch semiconductors and metals in microelectronics fabrication. This tutorial model studies chlorine plasma discharges using a global (volume-averaged) diffusion model. Global diffusion models can run simulations in a fraction ... Read More
This tutorial model solves for an inductively coupled plasma reactor in a mixture of SF6/argon. The model computes the fluid flow and gas heating. Important aspects and strategies for modeling electronegative discharges are discussed. Read More
This tutorial model solves for a hydrogen plasma created in a microwave cavity. The model computes the fluid flow and gas heating self-consistently. Read More
This tutorial model solves for an inductively coupled plasma reactor with RF bias (also known as ICP/CCP reactors) in a mixture of argon/chlorine. The model computes the fluid flow and gas heating. Important aspects and strategies for modeling electronegative discharges are discussed. Read More
This tutorial model solves for an inductively coupled plasma reactor in a mixture of argon/oxygen. The model computes the fluid flow and gas heating. Important aspects and strategies for modeling electronegative discharges are discussed. Read More
In this example, a hydrogen plasma reactor at moderate pressure is studied using a global model. The heavy species heat equation is included. In the first part of the study, a Maxwellian electron energy distribution function is used. In the second part, the global model is solved self ... Read More
In this set of eight tutorial models and associated documentation, you can investigate the resistive, capacitive, inductive, and thermal properties of a standard three-core lead-sheathed XLPE HVAC submarine cable with twisted magnetic armor (500 mm2, 220 kV). The series includes a 2D, 2D ... Read More
This tutorial studies the deposition of amorphous silicon using an inductively coupled plasma reactor with a silane/argon gas mixture. It examines how the deposition rate varies across the wafer as a function of silane mole fraction and input power. Read More
This tutorial studies the etching of silicon using an inductively coupled plasma reactor with an RF bias in a mixture of CF4/O2. The etching rate is computed along the wafer as a function of the RF bias voltage. Read More