Development of a Package for a Triaxial High-G Accelerometer Optimized for High Signal FidelityR. Langkemper , R. Külls , J. Wilde , S. Nau , S. Schopferer ,
 Fraunhofer-Institut für Kurzzeitdynamik, Ernst-Mach-Institut, EMI, Freiburg, Germany
 Albert-Ludwigs-Universität Freiburg, Institut für Mikrosystemtechnik, Freiburg, Germany
Acceleration is an important quantity to be measured in high-speed dynamics. A new piezoresistive sensor for the measurement of high-amplitude, short-duration transient accelerations of up to 100,000 g has been developed at the Fraunhofer EMI. Its figure of merit (sensitivity x resonance frequency²) is about one order of magnitude higher than that of comparable state-of-the-art sensors. Currently, we develop a triaxial sensor which integrates three uniaxial sensor elements onto a single ceramic substrate. Therefore, the sensor is simulated with different package concepts, varying material and geometric parameters for each concept. We used modal analysis, giving the value and shape of the resonance frequencies. Additionally, we simulated the sensor with an oscillating volume load swept over a frequency range from 0 to 250 kHz to derive the output signal for each frequency and to investigate the influence of the package on the sensitivity curve, the stress and displacement within the package.