Optimization of BAW Resonator for Wireless Applications Using Taguchi’s Orthogonal Array Method

R. Dudhe [1], A. Sumathy [1], T. Desai [1],
[1] Manipal University, Dubai, UAE
Published in 2015

BAW (Bulk Acoustic Wave) resonators are rapidly growing highly integrated devices with wide range of applications in wireless domains. Fabrication of thin film BAW resonators are highly challenging over material selections and measures of materials. RF properties of BAW resonators depending on the device parameters are simulated for their performance using COMSOL Multiphysics software. In our study, the measures of highly effective control parameters of resonator are actively optimized using Taguchi’s orthogonal array method. This study is quite competitive and is a tool for designers in selecting device parameters with required quality factor for futuristic wireless applications and is cost effective.