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Study of Fluid Dynamics and Heat Transfer in MEMS Structures

S. N. Das[1], G. Bose[2]
[1]Centurion University of Technology and Managment, Jatani, Bhubaneswar, Orissa, India
[2]Institute of Technical Education and Research, SOA University, Bhubaneswar, Orissa, India

This paper describes the characteristics of MEMS microchannel and various issues of its designing. Here the major parameters are pressure drop and heat transfer rate. Various structures are modeled and optimized to get a minimum pressure drop and maximum heat transfer rate. The simulation results provide the characterization for Temperature, Mass flow rate, Pressure drop and Reynolds number. Here material used is silicon and fluid is water. The dimension of the model designed is 10mm8mm1mm. and the diameters of the channels are 200µm, 500µm, 1000µm. Using COMSOL Multiphysics the various structures of micro channels were modeled. Conclusion we get is if we take staggered fin shape structure the result is optimized in term of pressure drop and heat transfer rate.