The Fabrication of a New Actuator Based on the Flexoelectric EffectS. Baskaran, S. Thiruvannamalai, N. Ramachandran, F.M. Sebastian, and J.Y. Fu
State University of New York at Buffalo, Buffalo, New York, USA
This paper presents a novel methodology towards the design, analysis, and the fabrication process involved in developing a cost effective method to create a piezoelectric actuator by means of the flexoelectric effect. The basic physical equations of the flexoelectric effect and the qualitative analysis of the flexoelectric actuator are done using COMSOL Multiphysics. This effect is used to align nano-particles within a closed medium such as a vacuum during semiconductor fabrication. The above analysis will in turn be utilized to gain a better understanding of the working principles behind various geometric shapes prior to the fabrication of the actuator. By using various shapes for the actuating electrode, we may gain a better understanding of the field strength capability, and thus increased control over the actuator itself.