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Multiphysics modeling and simulation drives innovation across industries and academia — as is evidenced by the many uses showcased in the technical papers and posters presented by engineers, researchers, and scientists at the COMSOL Conference each year.

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Plasma Scaling Leads the Transition from 2D to True 3D Models

J. Brcka [1],
[1] Tokyo Electron U.S. Holdings, Inc., Austin, TX, USA

Introduction: In inductively coupled plasma (ICP) systems the inductive antenna is coupled to the excited plasma inside the low pressure gas reactor. A multi-ICP system can be used for increased area processing and provide additional variables for controlling the plasma. However, ... Read More

Design and Characterization of MOEMS Optical Tweezers

J. A. Andrews[1], R. Chaubey[1], G. Dwivedi[1], V. Dwivedi[1], N. Sagar[1]
[1]National MEMS Design Center, Department of Applied Physics, Shri G S Institute of Technology & Science, Indore, Madhya Pradesh, India

Optical tweezers work on the idea of non-contact Optical Pressure felt by transparent particles, when shined by coherent light source such as lasers. On the other hand when light falls on the metal it excites the electron inside it and make them free. When these free electron cloud ... Read More

Improving Detection Sensitivity for Nanoscale Targets Through Combined Photonic and Plasmonic Techniques

G. Zhang[1], Y. Zhao[1]
[1]Clemson University, Clemson, SC, USA

Photonic technique such as the whispering gallery mode (WGM) is often used for detection of small particles like bacteria and viruses. It offers good detection sensitivity and is advantageous over other detection techniques because the detection can be label free. However, the detection ... Read More

Modeling and Simulation of Dielectric Barrier Discharge Plasma Reactor for Nitrogen Fixation Reaction

B.S. Patil[1], Q. Wang[2], V. Hessel[2], J. Lang[3]
[1]Eindhoven University of Technology, Eindhoven, The Netherlands
[2]Micro Flow Chemistry and Process Technology, Eindhoven University of Technology, Eindhoven, The Netherlands
[3]Innovation Management, Verfahrenstechnik & Engineering, Evonik Industries AG, Hanau-Wolfgang, Germany

Fixed nitrogen is used in many forms ranging from nitric acid to hydrogen cyanide and is used as such for industrial applications. The reactions to produce these products are highly endothermic and favored by high-temperature processing. The most basic route of chemically fixing nitrogen ... Read More

Single Discharge Simulations of Needle Pulses for Electrothermal Ablation

M. Hackert-Oschätzchen[1], M. Kreißig[1], M. Kowalick[1], H. Zeidler[1], A. Schubert[1], O. Kröning[2], M. Herzig[2], H.-P. Schulze[3]
[1]Professorship Micromanufacturing Technology, Technische Universität Chemnitz, Chemnitz, Germany
[2]Leukhardt Schaltanlagen Systemtechnik GmbH, Magdeburg, Germany
[3] Otto-von-Guericke-Universität Magdeburg, Magdeburg, Germany

Within this study a model of a single discharge of micro scale EDM was developed in accordance with Schulze et al [1]. The specific computation of the growth of the plasma channel has been derived from this literature. Applying COMSOL Multiphysics® a pseudo 3-D geometry was created based ... Read More

Scan Angle Stability of a Second-Order Plasma-Switched Frequency Selective Surface

L. W. Cross[1], M. J. Almalkawi[2]
[1]Imaging Systems Technology, Toledo, OH, USA
[2]EECS Department, College of Engineering, University of Toledo, Toledo, OH, USA

Large-area, light-weight electromagnetic protection (EP) structures are needed to protect sensitive microwave sensors and communications systems from high-power microwave (HPM) and electromagnetic pulse (EMP) threats. This paper presents the use of COMSOL Multiphysics® for ... Read More

Simulating Experimental Conditions of the HIIPER Space Propulsion Device

A. Krishnamurthy[1], G. Chen[1], B. Ulmen[1], D. Ahern[1], G. Miley[1]
[1]University of Illinois at Urbana - Champaign, Urbana, IL, USA

The Helicon-Injected Inertial Plasma Electrostatic Rocket (HIIPER) is a two-stage electric propulsion system comprising of a helicon plasma source and an inertial electrostatic confinement (IEC) device for plasma production and acceleration, respectively. Several diagnostics such as a ... Read More

The Fast Model for Ionic Wind Simulation

A. Samusenko[1], Yu. Stishkov[1], P. Zhidkova[1]
[1]Saint Petersburg State University, Research and Educational Center “Electrophysics”, St Petersburg, Russia

Ionic wind is the gas flow induced by the corona discharge. Ions produced by corona are accelerated by electric field and transfer their momentum to neutral molecules. Using ionic wind one can convert electric energy to kinetic energy of air flow almost directly. The phenomenon of ionic ... Read More

Studying Target Erosion in Planar Sputtering Magnetrons Using a Discrete Model for Energetic Electrons

C. Feist[1], A. Plankensteiner[2], J. Winkler[2]
[1]CENUMERICS, Innsbruck, Austria
[2]PLANSEE SE, Reutte, Austria

A discrete model for the prediction of relative ion bombardment flux and target erosion in planar sputtering magnetrons is implemented in COMSOL Multiphysics®. Planar magnetrons are used within physical vapor deposition (PVD) processes to form thin film depositions on various types of ... Read More

Propagation of Cathode-Directed Streamer Discharges in Air

Y. Serdyuk[1]
[1]Chalmers University of Technology, Gothenburg, Sweden

Streamers are considered as main cause of electrical breakdown in air at atmospheric pressure. A streamer is an ionization wave propagating in neutral gas which is converted into low-temperature plasma behind its front. A streamer model is based on drift-diffusion approach where space ... Read More

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