Modeling Capacitively Coupled Plasma with the COMSOL® Software
In this archived webinar, learn how to model capacitively coupled plasma (CCP) using a computational method available as of version 5.3a of the COMSOL® software.
The webinar includes a demonstration of the method, which computes the periodic steady-state solution faster than traditional methods. You can also calculate the DC self-bias in a natural way and quickly explore parametric spaces.
Want to learn more about plasma modeling? Contact COMSOL to evaluate the software.