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Note: This discussion is about an older version of the COMSOL Multiphysics® software. The information provided may be out of date.

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effeft of width on cantilever

Posted May 22, 2014, 3:57 a.m. EDT MEMS & Nanotechnology, MEMS & Piezoelectric Devices Version 4.3b 1 Reply

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If the change in width of the cantilever then pul l in voltage increses or decreses
1 Reply Last Post May 26, 2014, 4:18 a.m. EDT
Pieter Westerik
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Posted: 1 decade ago May 26, 2014, 4:18 a.m. EDT
That depends. Do you include the region next to the cantilever? This region does contribute to the bending force (fringing field effect) but not to the restoring force (stiffness of the cantilever). If you make the cantilever wider the restoring and bending force in the cantilever region grow equally fast, but the fringing field force remains the same, so the ratio restoring:bending force becomes larger, so your pull-in voltage should increase.
That depends. Do you include the region next to the cantilever? This region does contribute to the bending force (fringing field effect) but not to the restoring force (stiffness of the cantilever). If you make the cantilever wider the restoring and bending force in the cantilever region grow equally fast, but the fringing field force remains the same, so the ratio restoring:bending force becomes larger, so your pull-in voltage should increase.

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