Disc Resonator Anchor Losses

Application ID: 21031

This model shows how to compute the anchor loss limited quality factor of a diamond disc resonator. The resonator is anchored to the substrate by a polysilicon post and power is transmitted to the substrate through the post. A perfectly matched layer is used to represent the essentially infinite substrate. The model is based on a paper presented at the 2007 COMSOL conference in Grenoble:

P. Steeneken "Parameter Extraction and Support-Loss in MEMS Resonators", COMSOL Users Conference 2007, Grenoble

This model example illustrates applications of this type that would nominally be built using the following products: