Manufacturing Variation Effects in a Micromachined Comb-Drive Tuning Fork Rate Gyroscope

Application ID: 89261

This tutorial example is kindly provided by Dr. James Ransley at Veryst Engineering, LLC. This model continues from the base model “A Micromachined Comb-Drive Tuning Fork Rate Gyroscope”, which is also provided by Dr. Ransley. The model demonstrates how to accurately compute the effects of manufacturing variations of MEMS devices without the need of very fine mesh. This highly efficient modeling approach is based on the unique Deformed Geometry functionality of COMSOL Multiphysics, which implements the device shape change due to fabrication imperfections using the same mesh, thus eliminating the error introduced if different meshes were to be used for different geometries.

This model example illustrates applications of this type that would nominally be built using the following products: