Vibrating Micromirror with Viscous and Thermal Damping

Application ID: 14731

Micromirrors are used in certain MEMS devices to control optic elements. This model of a vibrating micromirror surrounded by air uses the Thermoacoustic-Shell Interaction user interface to model the fluid-solid interaction, and it thus includes the correct viscous and thermal damping of the mirror from the surrounding air. The resonance frequency of the mirror when under a torquing load is studied in the frequency domain by means of both frequency-response and eigenfrequency analyses. A simple RLC model is fitted to the system.

This model example illustrates applications of this type that would nominally be built using the following products: