Vibrating Micromirror with Viscous and Thermal Damping: Transient Behavior

Application ID: 49481

Micromirrors are used in certain MEMS devices to control optic elements. This example model illustrates a mirror that is initially actuated for a short time and then exhibits damped vibrations.

It simulates a vibrating micromirror surrounded by air and uses the Thermoviscous Acoustics, Transient, the Shell, and the Pressure Acoustics, Transient interfaces to model the fluid-solid interaction in the time domain. Use of the Thermoviscous Acoustics interface provides full details of viscous and thermal damping of the mirror in relation to the surrounding air.

This model example illustrates applications of this type that would nominally be built using the following products: