The Application Gallery features COMSOL Multiphysics® tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical disciplines. You can use these examples as a starting point for your own simulation work by downloading the tutorial model or demo app file and its accompanying instructions.
Search for tutorials and apps relevant to your area of expertise via the Quick Search feature. Note that many of the examples featured here can also be accessed via the Application Libraries that are built into the COMSOL Multiphysics® software and available from the File menu.
The underlying physics of a capacitively coupled plasma is rather complicated, even for rather simple geometric configurations and plasma chemistries. This model benchmarks the Capacitively Coupled Plasma physics interface against many different codes. Read More
Thermoelectric coolers are widely used for electronics cooling in various application areas, ranging from consumer products to spacecraft design. The thermoelectric modules are a common application of thermoelectricity in cooling engineering. They consist of several thermoelectric legs ... Read More
Capacitively coupled RF discharges can operate in two distinct regimes depending on the discharge power. In the low power regime, known as the alpha regime, the electric field oscillation is responsible to heat and create electrons. In the high power regime, known as gamma regime, the ... Read More
This model shows how shape optimization can be used design the coils of an ICP reactor to obtain plasma uniformity. The reactor in study is a planar ICP with the coils distributed along the radial direction. The Optimization study step is used to find the best coil placement so that the ... Read More
This model solves the Boltzmann equation in two-term approximation for a mixture of nitrogen and oxygen representing a background gas of dry air. Electron transport coefficients and source terms are computed by suitable integration of the electron energy distribution function over ... Read More
This tutorial model demonstrates how to compute the impedance of a capacitively coupled plasma. The Time Periodic study computes the time periodic solution of the plasma. Subsequently, the solution is transformed to the time domain, after which the fast Fourier transform (FFT) solver is ... Read More
This tutorial studies the etching of silicon using an inductively coupled plasma reactor with an RF bias in a mixture of CF4/O2. The etching rate is computed along the wafer as a function of the RF bias voltage. Read More
The Boltzmann equation can be solved to validate sets of electron impact collision cross sections. In fact, sets of collision cross sections are traditionally inferred by solving a two-term approximation to the Boltzmann equation and comparing the results to swarm experiments. This model ... Read More
This tutorial models a DC glow discharge by solving fluid-type plasma equations fully coupled with the homogeneous and time-independent electron Boltzmann equation in the classical two-term approximation. The approximated Boltzmann equation is solved for each position of space and is ... Read More
Streamers are transient filamentary electric discharges that can develop in a nonconducting background in the presence of an intense electric field. These discharges can attain high electron number density and consequently a high concentration of chemical active species that are relevant ... Read More