The Application Gallery features COMSOL Multiphysics® tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical disciplines. You can use these examples as a starting point for your own simulation work by downloading the tutorial model or demo app file and its accompanying instructions.
Search for tutorials and apps relevant to your area of expertise via the Quick Search feature. Note that many of the examples featured here can also be accessed via the Application Libraries that are built into the COMSOL Multiphysics® software and available from the File menu.
Chlorine Discharge Global Model
Plasma discharges containing chlorine are commonly used to etch semiconductors and metals in microelectronics fabrication. This tutorial model studies chlorine plasma discharges using a global (volume-averaged) diffusion model. Global diffusion models can run simulations in a fraction ... Read More
Drift Diffusion Tutorial
The Drift Diffusion interface solves a pair of reaction/advection/diffusion equations, one for the electron density and the other for the mean electron energy. This tutorial example computes the electron number density and mean electron energy in a drift tube. Electrons are released due ... Read More
GEC CCP Reactor, Argon Chemistry, 1D
The NIST GEC CCP reactor provides a platform for studying capacitively coupled plasmas. Even the simplest plasma models are quite involved so a 1D example helps in understanding the physics without excessive CPU time. The problem has no steady-state solution, although a periodic steady ... Read More
Hydrogen Global Model Coupled with the Two-Term Boltzmann Equation
In this example, a hydrogen plasma reactor at moderate pressure is studied using a global model. The heavy species heat equation is included. In the first part of the study, a Maxwellian electron energy distribution function is used. In the second part, the global model is solved self ... Read More
DC Glow Discharge Coupled with the Two-Term Boltzmann Equation
This tutorial models a DC glow discharge by solving plasma fluid type equations fully coupled with the homogeneous and time-independent electron Boltzmann equation in the classical two-term approximation. The approximated Boltzmann equation is solved for each position of space and is ... Read More
Harmonic Content of the Power Deposition into a Dual Frequency Capacitively Coupled Plasma
Energy transfer from the time varying electrostatic field to electrons in a capacitively coupled plasmas (CCP) does not exclusively occur at twice the RF frequency. Due to the highly nonlinear mechanism of power transfer from the fields to the electrons, power deposition occurs at ... Read More
Alpha to Gamma Transition
Capacitively coupled RF discharges can operate in two distinct regimes depending on the discharge power. In the low power regime, known as the alpha regime, the electric field oscillation is responsible to heat and create electrons. In the high power regime, known as gamma regime, the ... Read More
Trimmer Capacitor
A trimmer capacitor has a variable capacitance. One way of obtaining this is to use parallel facing electrodes with a variable overlap area. In this example, the capacitance can be changed by turning one electrode using a screwdriver. Typically a linear angular response is desired. ... Read More
Hydrogen Boltzmann Analysis
This model solves the Boltzmann equation in the two-term approximation for a background of molecular and atomic hydrogen. Electron mobility and source terms are computed by suitable integration of the electron energy distribution function over electron impact cross sections. Read More
Transient Negative Mobility and Negative Differential Conductivity Effects in Xenon
This tutorial model presents a study showing the transient negative mobility and the negative differential conductivity effects in xenon. The stationary and time dependent Boltzmann equation in the two-term approximation is used to compute the electron energy distribution function. ... Read More