The Application Gallery features COMSOL Multiphysics® tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical disciplines. You can use these examples as a starting point for your own simulation work by downloading the tutorial model or demo app file and its accompanying instructions.
Search for tutorials and apps relevant to your area of expertise via the Quick Search feature. Note that many of the examples featured here can also be accessed via the Application Libraries that are built into the COMSOL Multiphysics® software and available from the File menu.
This tutorial model explores the behavior of a microwave plasma torch. The plasma is generated within a dielectric tube inserted in a rectangular waveguide. The simulation solves the coupled equations for plasma transport and heating, microwave electromagnetic fields, fluid flow, and ... Read More
This tutorial studies the deposition of amorphous silicon using an inductively coupled plasma reactor with a silane/argon gas mixture. It examines how the deposition rate varies across the wafer as a function of silane mole fraction and input power. Read More
In this example, the etching of silicon in a CF4/O2 plasma reactor is studied using a global model. Parametric sweeps for ion energy and oxygen mole fraction are computed. Read More
This tutorial studies the etching of silicon using an inductively coupled plasma reactor with an RF bias in a mixture of CF4/O2. The etching rate is computed along the wafer as a function of the RF bias voltage. Read More
Electron transport in low-temperature plasmas depends strongly on the electron energy distribution function (EEDF), which is often approximated as Maxwellian but is frequently nonequilibrium in reality. Incorporating nonequilibrium EEDF behavior into spatially dependent models often ... Read More