A. T. Galisultanov , P. Le Moal , V. Walter , G. Bourbon ,
 FEMTO-ST, Besanson, France
During last twenty years capacitive micromachined ultrasonic transducers (CMUT) have been developed extremely fast [1-2]. CMUT is an attractive alternative to traditional piezoelectric transducer, which converts electrical signal to mechanical vibration and vice versa. The main advantages of CMUT compared to most common solution: wide bandwidth (improved image resolution) and compatibility with ...
Design for Reliability and Robustness through Probabilistic Methods in COMSOL Multiphysics with OptiY
T.-Q. Pham, H. Neubert, and A. Kamusella
OptiY e.K., Aschaffenburg, Germany
Institute of Electro-Mechanical and Electronic Design, TU Dresden, Germany
One challenge in designing micro-electromechanical systems (MEMS) is considering the variability of design parameters caused by manufacturing tolerances and material properties. The function of MEMSs is significantly influenced by this variability, which can be represented in terms of statistical variables. In order to involve statistical design parameters into the design optimization process, ...
Design and Optimization of an All Optically Driven Phase Correction MEMS Deformable Mirror Device using Finite Element Analysis
V. Mathur, K. Anglin, V.S. Prasher, K. Termkoa, S.R. Vangala, X. Qian, J. Sherwood, W.D. Goodhue, B. Haji-Saeed, and J. Khoury
Photonics Center, University of Massachusetts-Lowell, Lowell, Massachusetts, USA
Air Force Research Laboratory/Sensors Directorate, Hanscom Air Force Base, Massachusetts, USA
Optically addressable MEMS mirrors are required for future high density adaptive optics array systems. We have demonstrated a novel technique of achieving this by actuating low stress Silicon Nitride micro mirrors via cascaded wafer bonded Gallium Arsenide photo detectors on Gallium Phosphide. In the work reported here, we discuss the key design parameters of the device, and present the finite ...
3D-Modeling of Magnetophoretic Separation of Superparamagnetic Dispersions Using COMSOL Multiphysics® Particle Tracing Module
D. Kleinehanding, L. Teich, C. Schröder
Department of Engineering Sciences and Mathematics, Computational Materials Science & Engineering (CMSE), University of Applied Sciences Bielefeld, Bielefeld, Germany
Magnetophoresis is a process of great interest for novel applications based on magnetic nanoparticles and colloids. Environmental applications like wastewater treatments and pollutant removal, biomedical applications like protein isolation, drug delivery, magnetic hyperthermia for cancer treatment, and magnetic-particle imaging are just a few of the numerous technological areas which exploit the ...
C. R. Pérez , J. J. Santiago-Avilés ,
 Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, PA, USA
 Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, PA, USA
Sensorineural hearing loss is the most common sensory deficit in the world, and within this category damage or loss of the primary sensory cells of the inner ear, known as hair cells is the most common cause . Partial hearing loss is addressed by the use of hearing aids, electronic devices that greatly amplify sound directly into the user's ear, but for more severe cases cochlear implants are ...
O. Sardan, D. Petersen, O. Sigmund, and P. Boggild
DTU Nanotech, Denmark
DTU Mechanical Engineering, Denmark
In this work, electrothermal microgrippers designed using topology optimization are modeled. The microgrippers are composed of two 5 μm-thick polysilicon actuators facing each other. The gap between the actuators are 2 μm in the initial state and the microgrippers are able to both fully close and further open this gap. The operation principle of the actuators is quite similar to that of a ...
Modeling Electric Fields in Slit Capillary Array Fluidic Actuators with Complex Electrode Geometries
J. Frey, A. Droitcour, D. Laser
Wave 80 Biosciences, San Francisco, CA, USA
With their small size, low manufacturing cost, fast transient response, and capacity to generate fluid power directly from small electrical power sources, microdevices incorporating electroosmostic flow (EOF) have wide-ranging applications, including newly developed high-performance bioassay systems suitable for use in resource-limited settings. We report on a class of EOF-based devices called ...
M. Maitra , H. B. Nemade , S. Kundu ,
 Indian Institute of Technology Guwahati, Guwahati, Assam, India
The objective of this paper is to show the simulation of a piezoelectric thin film device and its application as a sensor. Piezoelectric aluminum nitride thin film clamped at two ends is simulated using COMSOL Multiphysics software. The device consists of the piezoelectric thin film suspended on a cavity etched on a silicon substrate. Two metal electrodes are placed at the two fixed sides of the ...
H. J. Hall , L. A. Starman ,
 Sensors Directorate, Air Force Research Laboratory, Wright-Patterson AFB, OH, USA
Beam steering and adaptive optics micromirror applications commonly demand optically flat surfaces with minimal mass. When reflective coatings (usually metallic Au or Al) are applied to micromirror surfaces in order to meet optical reflectivity requirements the resulting film stress (usually tensile) can be substantial. The mass of the mirror can be a limiting factor in the dynamic performance. ...
A. Weddemann, A. Auge, F. Wittbracht, C. Albon, and A. Hütten
Department of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
In this work, we demonstrate the implementation of the micromagnetic equations for the description of ferromagnetic thin films in COMSOL Multiphysics®. We apply our model to magnetoresistive sensors consisting of several soft ferromagnetic layers and their response to magnetic particles. The magnetization dynamic of the particles needs to be described in a similar manner, though due to size ...