A. Arevalo , D. Castro , D. Conchouso , I. G. Foulds 
 Computer, Electrical and Mathematical Sciences and Engineering (CEMSE), King Abdullah University of Science and Technology (KAUST), Saudi Arabia
 The University of British Columbia, School of Engineering, Okanagan Campus, Saudi Arabia
For our simulation we used the Piezoelectric Devices interface. The structure was set with (clamped) fix constraint boundaries to both ends. The bottom electrode was set to be the ground for the electrostatic physics and the top electrode was set to be a Terminal with potential of 10V. A parametric sweep study was set to change the geometry, the parameters to change was the hole diameter (Holed) ...
R. Xu , M. Guizzetti , K. Astafiev , E. Ringgaard , T. Zawada ,
 Meggitt A/S, Kvistgaard, Denmark
FEM (Finite Element Method) modelling software such as COMSOL Multiphysics® can be a powerful tool for modelling the behavior and response of piezoelectric materials and devices . Devices based on piezoelectric crystals are particularly well suited, because the polarization magnitude in crystals is predetermined and its orientation is defined by how it was cut with respect to the lattice ...
Parametric Study of Polyimide - Lead Zirconate Titanate Thin Film Cantilevers for Transducer Applications
A. Arevalo, I.G. Foulds
King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia
The simulation of the piezoelectric actuation of the micro-cantilever is presented. Lead Zirconate Titanate (PZT) was chosen for the device fabrication design, due to its thin film processing flexibility. Four layers compose the cantilever structures presented in this work: PZT (piezoelectric material), Platinum (electrodes) and Zirconium Oxide as the buffer layer for the PZT film and polyimide ...
S. Kundu , H. B. Nemade ,
 Indian Institute of Technology Guwahati, Guwahati, Assam, India
The paper presents simulations of uniform thickness and thickness-tapered types of piezoelectric vibration energy harvesters using COMSOL Multiphysics software. The simulated vibration energy harvesters have bimorph cantilever structure with end mass. Tapering the thickness of the piezoelectric layer in bimorph towards the free end is found to improve the stress distribution in the beam and ...
A. Arevalo , D. Conchouso , D. Castro , M. Diaz , I. G. Foulds ,
 CEMSE Division, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
 Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
 University of British Columbia, Vancouver, BC, Canada
INTRODUCTION: Micro Electro Mechanical Systems (MEMS) are fabricated with an in-plane fabrication technology. Out-of-plane structures can be designed to be assembled to provide thermal and electrical isolation from the substrate [1 -3]. These isolations can potentially improve the performance of a range of MEMS devices by decreasing any unwanted coupling effects or parasitic losses from the ...
Design and Simulation of High-Throughput Microfluidic Droplet Dispenser for Lab-on-a-Chip Applications - new
C. Jin, X. Xiong, P. Patra, R. Zhu, J. Hu
Department of Biomedical Engineering, University of Bridgeport, Bridgeport, CT, USA
Department of Electrical and Computer Engineering, University of Bridgeport, Bridgeport, CT, USA
Department of Mechanical Engineering, University of Bridgeport, Bridgeport, CT, USA
Digital Microfluidic Biochip (DMFB) has been widely used in Lab-on-a-Chip (LoC) for disease diagnosis and treatment applications. To quickly convert traditional analog fluidic sample into digital droplets for DMFB processing, a high-throughput microfluidic droplet dispenser device is needed. In this paper, a high-throughput analog-to-digital microdroplet dispenser for Lab-on-a-Chip application ...
B. Cahill, A. Giannitsis, G. Gastrock, M. Min[1,2], and D. Beckmann
Institut für Bioprozess- und Analysenmesstechnik e.V., Heiligenstadt, Germany
 Department of Electronics, Tallinn University of Technology, Tallinn, Estonia
Electrowetting occurs with the electrical control of the surface wetting properties through the application of an electric potential. A simulation of electrowetting driven droplet dynamics is performed using the COMSOL Multiphysics level-set method for a sessile droplet and for a droplet in a microchannel. The response of the drop to a step voltage is studied. The contact angle at one edge of ...
Design and Analysis of Micro-Heaters for Temperature Optimization using COMSOL Multiphysics for MEMS Based Gas Sensor
V. S. Selvakumar, L. Sujatha
Rajalakhmi Engineering College, Chennai, Tamil Nadu, India
Micro-Heaters are the key components in sub-miniature micro-sensors, especially in gas sensors. The metal oxide gas sensors utilize the properties of surface adsorption to detect changes in resistance as a function of varying concentration of different gases . To detect the resistive changes, the heater temperature must be in the requisite temperature range over the heater area. Hence the ...
Primary Current Distribution Model for Electrochemical Etching of Silicon through a Circular Opening
A. Ivanov , U. Mescheder ,
 Hochschule Furtwangen University, Furtwangen im Schwarzwald, Germany
Primary current distribution model for anodization of low-doped p-type silicon through a circular opening in frontside insulating mask is developed. The model is applied in two regimes of the process – pore formation and electropolishing – by definition of current density dependent functions of porosity and dissolution valence based on experimental results. As found also experimentally, ...
M. Kaushik , S. Katti , V. Saradesai , P. Naragund , P. Vidhyashree , A. K. V. Nandi 
 B.V. Bhoomaraddi College of Engineering and Technology, Hubli, India
This article describes the design of MEMS based cantilever structure intended for determination of blood group and it is compared with manual method. Cantilever structure design has a sensing layer and when a blood sample comes in contact with this, results in coagulation. The surface tension in turn occurs due to chemical and biological reactions of antigen and antibodies resulting in ...