U. Vogel , M. Spindler , S. Wege , T. Gemming 
 Leibniz Institute for Solid State and Materials, Dresden, Germany
In this work, we seek to simulate SAWs for a better understanding and to benchmark the currently available cloud computing possibilities of COMSOL Multiphysics® software. By using the MEMS module we demonstrate 3D models with reduced geometry to achieve principle information about the wavefield. For a benchmark, a high-speed workstation with limited memory (RAM) is compared to the most potent ...
A. Pasumarthy , H. Sinha , A. Islam ,
 Birla Institute of Technology, Mesra, Ranchi, Jharkhand, India
Gecko foots have inspired researchers to develop designs that can help robots to tread vertically oriented surface. These nanobots find many applications as they can perform a lot of operations more efficiently and also lower the cost of such operations. These can be employed in various fields: medical, industrial etc. Gecko lizards use dry adhesion van der Waals forces to climb walls produced ...
G. Gomila , L. Fumagalli , R. Fabregas ,
 Institut de Bioenginyeria de Catalunya (IBEC), Departament d’Electrònica, Universitat de Barcelona, Barcelona, Spain
 School of Physics and Astronomy, University of Manchester, Manchester, United Kingdom
 Institut de Bioenginyeria de Catalunya (IBEC), Universitat de Barcelona, Barcelona, Spain
Electrical scanning probe microscopy (SPM) techniques, such as electrostatic force microscopy, nanoscale impedance microscopy or scanning near field microwave microscopy, are a relatively new branch of microscopy techniques that can generate images of the nanoscale electrical properties of samples (conductivity, permittivity, charge, etc.). These techniques scan the surface of a sample ...
S. Dixit, R. C. Jain
Jaypee Institute of Information Technology, Noida, Uttar Pradesh, India
Surface Acoustic Waves (SAW) is the acoustic wave that propagates along the surface of the substrate with amplitude decaying exponentially away from the surface. A basic SAW device consists of two IDT’s on a piezoelectric substrate such as quartz. Surface Acoustic Wave can be generated by application of a voltage to an IDT deposited on the surface of a piezoelectric substrate. The ...
Design and Analysis of Micro-Heaters for Temperature Optimization using COMSOL Multiphysics for MEMS Based Gas Sensor
V. S. Selvakumar, L. Sujatha
Rajalakhmi Engineering College, Chennai, Tamil Nadu, India
Micro-Heaters are the key components in sub-miniature micro-sensors, especially in gas sensors. The metal oxide gas sensors utilize the properties of surface adsorption to detect changes in resistance as a function of varying concentration of different gases . To detect the resistive changes, the heater temperature must be in the requisite temperature range over the heater area. Hence the ...
H. du Plessis, W. Perold
University of Stellenbosch, Stellenbosch, South Africa
Surface acoustic wave (SAW) devices are widely used for their sensing capabilities and gas sensing is only one of many uses. There is an ever increasing need to make them as effective as possible by adding nanomaterials to the device. In this study a two-port delay-line structure with 128YX lithium niobate was simulated with COMSOL Multiphysics® in the form of a 2D cross-section. ZnO nanopillars ...
P. Priya , B. D. Pant ,
 Birla Institute of Technology and Science Pilani, Pilani, Rajasthan, India
 CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan, India
In this paper, a free membrane is used as a receiver to increase the capacitance and therefore the resolution of the flow meter. For the current application, from the wavelength of sound wave in soft tissue (c= 1540 m/s) the resolution was calculated to be 0.48 mm. This gives the first Eigen frequency of the capacitive structure according to which the poly silicon membrane was designed. After ...
H.T.D. Grigg, T.H. Hanley, B.J. Gallacher
Newcastle University, Newcastle upon Tyne, United Kingdom
This work is concerned with systems possessing cyclic symmetries. In particular, we concentrate on the case in which the medium possesses infinite order cyclic symmetry, while the constitutive relations have cyclic symmetry of a lower order. We investigate the interactions between modes with cyclic symmetry of order n and geometries with underlying cyclic symmetry of order M. Rayleigh's ...
A. R. Kalaiarasi, and S. H. Thilagar
Electrothermal actuators are capable of providing larger displacements compared to electrostatic actuators. Four designs for ETC actuators with the same material properties and same dimensions are studied.
N. J. Krishnapriya, M. R. Baiju
College of Engineering, Trivandrum, Kerala, India
In this paper, design and analysis of a novel MEMS capacitive microphone which uses corrugations and perforations in diaphragm is presented. The corrugation and perforation in diaphragm reduces the residual stress and increases the mechanical sensitivity of diaphragm. Instead of the perforated back plate, holes have been made on the diaphragm. Therefore, potassium hydroxide (KOH) etching can be ...