T. Desai , R. Dudhe , S. Ayyalusamy ,
 Manipal University, Dubai, UAE
Piezoelectric energy conversion has received great attention for vibration-to-electric energy conversion over the last five years. A typical piezoelectric energy harvester is a unimorph or a bimorph cantilever located on a vibrating host structure, to generate electrical energy from base excitations. In this paper we have optimized the dimensions of the proof mass and the bimorph piezoelectric ...
N. Gouthami, D. Parthiban, M. Alagappan, and G. Anju
PSG College of Technology
Tamil Nadu, India
The objective of this paper is to design a 3D Gas Sensor for sensing Hydrogen gas and to increase the conductivity at nano level. In this novel design, nanorods act as the sensing layer. The sensitivity towards gas adsorption is found to be increased due to its high surface to volume ratio. The total displacement and voltage on intermediate layer after gas adsorption will be changing by varying ...
COMSOL Multiphysics® Based Identification of Thermal Properties of Mesoporous Silicon by Pulsed Photothermal Method - new
N. Semmar, I. El Abdouni, A. Melhem
GREMI-UMR7344, CNRS/University of Orléans, Orléans, France
The silicon is mainly known under its single-crystal shape and polycrystalline. Since a few decades, a new type of morphology is developed: the porous silicon (p-Si). Meso-porous silicon (Mp-Si) is one of promising materials for future microelectronic chips multi-functionalization systems, and for micro-sensing devices. For thermal properties investigation many experimental systems were ...
Parametric Study of Polyimide - Lead Zirconate Titanate Thin Film Cantilevers for Transducer Applications
A. Arevalo, I.G. Foulds
King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia
The simulation of the piezoelectric actuation of the micro-cantilever is presented. Lead Zirconate Titanate (PZT) was chosen for the device fabrication design, due to its thin film processing flexibility. Four layers compose the cantilever structures presented in this work: PZT (piezoelectric material), Platinum (electrodes) and Zirconium Oxide as the buffer layer for the PZT film and polyimide ...
Y. Jin , S. Kumar , R. A. Gerhardt ,
 School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA, USA
1. Introduction The electrical properties of materials are important in many different applications. In microelectronics for example, films must perform as insulators, semiconductor or as conducting layers. In recent years, scanning probe methods are being extended to the nanometre scale range since accurate high spatial resolution measurements of electrical properties are of great interest ...
N. J. Krishnapriya, M. R. Baiju
College of Engineering, Trivandrum, Kerala, India
In this paper, design and analysis of a novel MEMS capacitive microphone which uses corrugations and perforations in diaphragm is presented. The corrugation and perforation in diaphragm reduces the residual stress and increases the mechanical sensitivity of diaphragm. Instead of the perforated back plate, holes have been made on the diaphragm. Therefore, potassium hydroxide (KOH) etching can be ...
B. Cahill, A. Giannitsis, G. Gastrock, M. Min[1,2], and D. Beckmann
Institut für Bioprozess- und Analysenmesstechnik e.V., Heiligenstadt, Germany
 Department of Electronics, Tallinn University of Technology, Tallinn, Estonia
Electrowetting occurs with the electrical control of the surface wetting properties through the application of an electric potential. A simulation of electrowetting driven droplet dynamics is performed using the COMSOL Multiphysics level-set method for a sessile droplet and for a droplet in a microchannel. The response of the drop to a step voltage is studied. The contact angle at one edge of ...
T.Madhuranath, R.Praharsha, Dr.K.Srinivasa Rao
Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India
MEMS is the leading technology which combines both electronic and mechanical devices on a single microchip. Tracing the position of the object is an important problem in engineering. This can be addressed by Gyroscopes. These sensors are used to find orientation and angular velocity. This paper focuses on 3D MEMS Piezoelectric Gyroscope. COMSOL Multiphysics® is used for designing and ...
S. Dixit, R. C. Jain
Jaypee Institute of Information Technology, Noida, Uttar Pradesh, India
Surface Acoustic Waves (SAW) is the acoustic wave that propagates along the surface of the substrate with amplitude decaying exponentially away from the surface. A basic SAW device consists of two IDT’s on a piezoelectric substrate such as quartz. Surface Acoustic Wave can be generated by application of a voltage to an IDT deposited on the surface of a piezoelectric substrate. The ...
A. Ravi, R. Krishna, J. Christen
Arizona State University, Tempe, AZ, USA
Capacitive MEMS sensors offer high spatial resolution, sensitivity and good frequency response. In this paper, we present a circular membrane capacitive MEMS device that finds use both as capacitive micromachined ultrasonic transducer (CMUT) and pressure sensor. The MEMS device is first designed and simulated to work as a CMUT operating at about 5 MHz frequency. The device can also function as a ...