C. Zheng , X. Xiong , J. Hu 
 Department of Electrical and Computer Engineering, University of Bridgeport, Bridgeport, CT, USA
 Department of Mechanical Engineering, University of Bridgeport, Bridgeport, CT, USA
Introduction: Inertial navigation requires acceleration measurement along all three degree-of-freedoms. Most accelerometers are designed to measure acceleration along a single sensitive direction. For complete inertial sensing, a move effective accelerometer which can sense acceleration along multiple axes is needed. In this research, a dual-axis MEMS (Microelectromechanical Systems) ...
N. Bhalla, S. Li, and D. Chung
Chung Yuan Christian University, Taiwan, (R.O.C)
National Tsing Hua University, Taiwan, (R.O.C)
Different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Different position and varied number of supporting flexures attached to the proof mass makes each configuration distinct. The piezoresistors are placed near the proof mass and frame ends ...
D. Chauhan, B. D. Pant
Kurukshetra University, Kurukshetra, Haryana, India
CSIR- Central Electronics Engineering Research Institute, Pilani, Rajasthan, India
Load cells are force sensors, which are used in weighing equipment. The objective of this work is to develop MEMS based load cell. In this work two different load cell designs were simulated. First design is based on compressing a meander like polysilicon strain gage for the measurement of high forces up to 10kN. Second design is based on MEMS pressure sensor consisting of membrane, on which ...
S. Sihn[1,2], and A.K. Roy
Air Force Research Laboratory, Wright-Patterson Air Force Base, Dayton, Ohio, USA
University of Dayton Research Institute, Dayton, Ohio, USA
COMSOL Multiphysics was used to solve a phonon Boltzmann transport equation (BTE) for nanoscale heat transport problems. One dimensional steady-state and transient BTE problems were successfully solved based on finite element and discrete ordinate methods for spatial and angular discretizations, respectively, by utilizing the built-in feature of the COMSOL, Coefficient Form of PDE.
Design and Simulation of High-Throughput Microfluidic Droplet Dispenser for Lab-on-a-Chip Applications - new
C. Jin, X. Xiong, P. Patra, R. Zhu, J. Hu
Department of Biomedical Engineering, University of Bridgeport, Bridgeport, CT, USA
Department of Electrical and Computer Engineering, University of Bridgeport, Bridgeport, CT, USA
Department of Mechanical Engineering, University of Bridgeport, Bridgeport, CT, USA
Digital Microfluidic Biochip (DMFB) has been widely used in Lab-on-a-Chip (LoC) for disease diagnosis and treatment applications. To quickly convert traditional analog fluidic sample into digital droplets for DMFB processing, a high-throughput microfluidic droplet dispenser device is needed. In this paper, a high-throughput analog-to-digital microdroplet dispenser for Lab-on-a-Chip application ...
A. Arevalo , D. Conchouso , D. Castro , M. Diaz , I. G. Foulds ,
 CEMSE Division, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
 Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
 University of British Columbia, Vancouver, BC, Canada
INTRODUCTION: Micro Electro Mechanical Systems (MEMS) are fabricated with an in-plane fabrication technology. Out-of-plane structures can be designed to be assembled to provide thermal and electrical isolation from the substrate [1 -3]. These isolations can potentially improve the performance of a range of MEMS devices by decreasing any unwanted coupling effects or parasitic losses from the ...
R. Xu , M. Guizzetti , K. Astafiev , E. Ringgaard , T. Zawada ,
 Meggitt A/S, Kvistgaard, Denmark
FEM (Finite Element Method) modelling software such as COMSOL Multiphysics® can be a powerful tool for modelling the behavior and response of piezoelectric materials and devices . Devices based on piezoelectric crystals are particularly well suited, because the polarization magnitude in crystals is predetermined and its orientation is defined by how it was cut with respect to the lattice ...
S. Silvestrini ,
 Delft University of Technology, Delft, Netherlands
The analyzed MEMS oscillator is composed by a spring (beam) supported mass that needs to vibrate with a high Q-factor in the horizontal plane. Nevertheless, the transverse motion needs to be highly damped (low Q-factor). The purpose of the work was to explore different system configurations to determine the most suitable one for the scope of the device. Different parameters were varied to sweep ...
A. Ravi, R. Krishna, J. Christen
Arizona State University, Tempe, AZ, USA
Capacitive MEMS sensors offer high spatial resolution, sensitivity and good frequency response. In this paper, we present a circular membrane capacitive MEMS device that finds use both as capacitive micromachined ultrasonic transducer (CMUT) and pressure sensor. The MEMS device is first designed and simulated to work as a CMUT operating at about 5 MHz frequency. The device can also function as a ...
A. R. Kalaiarasi, and S. H. Thilagar
Electrothermal actuators are capable of providing larger displacements compared to electrostatic actuators. Four designs for ETC actuators with the same material properties and same dimensions are studied.