Kinetic Investigation of a Mechanism for Generating Microstructures on Polycrystalline Substrates Using an Electroplating Process
T. Soares, H. Mozaffari, H. Reinecke
Universität Freiburg, Freiburg im Breisgau, BW, Germany
Hochschule Furtwangen, Tuttlingen, BW, Germany
The purpose of this study is to understand the growth mechanism of copper (Cu) films on a Cu-Zn system substrate with a pre-defined pattern. The pattern was defined by conducting a selective etching process on a two-phase polycrystalline substrate. As a result of this process, there were etched regions correspondent to beta-phase crystals and quasi non-etched regions that belong to alpha-phase ...
University of Kassel, Kassel, Germany
In order to design an RF MEMS based device, it is beneficial to have information concerning mechanical behavior. For model verification purpose, solution offered by simulation software equipped with predefined physics application is one valuable way to provide initial reference. To avoid unwanted particular total strain in RF MEMS structures, a compensation layer can be utilized. When the number ...
A. Arpys Arevalo Carreno, E. Byas, I.G. Foulds
King Abdullah University of Science and Technology, Thuwal, Mecca, Kingdom of Saudi Arabia
In semiconductor gas sensors, the base of the gas detection is the interaction of the gaseous species at the surface of the semiconducting sensitive material. Since the chemical reactions at the surface of the sensor material are functions of temperature. We simulate our µHeater design on a Buckled Cantilever Plate (BCP). Such structure allows the sensor to be suspended for thermal insulation. ...
Multiphysics and Simulation of MEMS based Bolometer for Detecting the Radiations in Nuclear Power Plants
K. Umapathi, S. Swetha, K. Ranjitha, K. Vinodh, K. Deebiga, R. Harisudarsan
United Institute of Technology, Coimbatore, TamilNadu, India
Sri Krishna College of Engineering and Technology, Coimbatore, Tamil Nadu, India
High performance micro sensors are important to detecting special nuclear materials radiations in different fields to save the globe. This paper is mainly focused on to develop a MEMS based bolometer for detecting the nuclear radiation to provide the high security in Nuclear power Plants. A thermally sensitive micro metal plate is designed and placed on a substrate through micro thermal link. ...
M. Williams, J. Zito, J. Agashe, A. Sopeju, and D. Arnold
University of Florida, Gainesville, USA
This paper describes the design of a normally closed, electrodynamic microvalve. Magnetic forces between a permanent magnet in the valve cover and a soft magnet in the valve seat hold the valve closed. The combination of electrodynamic actuation and a mechanical restoring spring are used to open the valve. A device model and a design optimization strategy using COMSOL ...
H-Y. Shen, H-P. Tsui, J-C .Hung, S-Y. Lin, and B-H. Yan
Metal Industries Research and Development Centre, Taichung, Taiwan
National Central University, Chungli, Taiwan
In this work, the process of micro-channels in electrochemical micro-milling by using rotating magnet assisted helical tool is presented. The results show helical tool and Lorentz force of the rotating magnetic field that enhance the renewal of the electrolyte and machining efficiency. The feed rate can be raised under the magnetic field assisted in terms of experimental results; moreover, the ...
Reliability Enhancement of Bio MEMS based Cantilever Array Sensors for Antigen Detection System using Heterogeneous Modular Redundancy
L. S. Sundharam
Kumaraguru college of Technology, Coimbatore, Tamil nadu, India
The objective of the work is to propose a reliability enhancement model for antigen detection system (ADS) using bio MEMS based cantilever array sensors using heterogeneous modular redundancy technique. The reliability of the ADS is expressed in terms of the constituent sub systems which are heterogeneous not only in their respective structures and behaviors but also in their forms. The possible ...
J. G. Immanuel, K. Poojitha, B. Viknesshwar, A. Gupta
PSG College of Technology, Peelamedu, Coimbatore, Tamil Nadu, India
The paper brings out the designing and implementation of blood viscosity monitoring device that gives us the INR to measure the effectiveness of anti coagulant medications .When a blood vessel is damaged, clotting cascade begins that results in blood clot. This process is affected by several medical conditions where it becomes mandatory for a patient to intake anti-coagulants. Thus to monitor ...
P. Prema, Sakthivishnu.R, Sowmya. R, Chandra Devi K, Meenakshi Sundaram. N
PSG College of Technology, Coimbatore, Tamil Nadu, India
An artificial hand is the one that replaces the hand lost through trauma, disease, or congenital conditions. The proposed design is to simulate a sensor, used in prosthetic hand so as to measure the pressure required to hold the object, using COMSOL Multiphysics®. The physical parameters such as size, shape and mass of the object were optimized so as to hold an object. The weight of the object ...
Design of a MEMS Resonator for a Centre Frequency Greater than 26.35 MHz and Temperature Coefficient Frequency Less than 0.5 ppm
S.Manikandan, R.Radeep krishna
Kalasalingam University, Department of ECE, Srivilliputtur ,Krishnan koil, Tamil Nadu, India
The variability of the design parameters caused by material properties like thermal conductivity is the major challenge in Micro Electromechanical System (MEMS). In resonator design the basic problem is that the frequency changes with temperature variation and quantitative explanation with respect to this varies. The change can be attributed to the stability in terms of frequency drift in parts ...