H. van Halewijn, J. Beek
Physixfactor, Nijmegen, The Netherlands
NXP, Eindhoven, The Netherlands
It is important in designing micro-electromechanical systems (MEMS) to reduce the variability of design parameters caused by manufacturing tolerances and material properties. At NXP COMSOL has been used to investigate many aspects of the design, such as the Q-factor, anchor losses, thermal behavior, parasitic capacitance of the resonator and more. Quartz crystal resonators are used in many ...
J. Golebiowski ,
 Dept. of Semiconductor and Optoelectronics Devices, Lodz University of Technology, Lodz, Poland
The transducer's construction used for current measurement in medium voltage power lines for current values kA is shown. The transducer involves magnetic circuit with a gap in which a MEMS structure with a movable cantilever is placed. The beam is made of silicon with a NiFe layer. The beam with the ferromagnetic layer is deflected due to effecting magnetic field. The deflection of the beam is ...
Experimentally Matched Finite Element Modeling of Thermally Actuated SOI MEMS Micro-Grippers Using COMSOL Multiphysics
M. Guvench, and J. Crosby
University of Southern Maine, Gorham, Maine, USA
In “Micro-Electro-Mechanical-Systems” shortly known as MEMS, one of the most important and effective principle of creating transduction of electrical power to displacement force is thermal expansion. A slim beam of MEMS material, typically Silicon, is heated by the application of electrical current via Joule heating; it expands and creates motion. In the design of many MEMS devices ...
G. Zhu, and Y. Li
Lawrence Technological University, Southfield, MI, USA
Fluids used in biomedical microelectromechanical systems (BioMEMS) devices often exhibit very different flow behavior from those in bulk solutions, which in turn affects the behavior of cells and biomolecules in the device. In this work, we investigate an integrated microfluidic system for living cell culture and assay. The system can be used as a generic platform to study the behavior of ...
S. Heß, R. Külls, and S. Nau
The Fraunhofer Ernst-Mach-Institute (EMI) developed a novel, high-g accelerometer, which is an undamped MEMS device, containing self-supporting piezoresistive elements. The main requirements for such a sensor are high sensitivity, high resonant frequency and a solid mechanical design. Due to the fact, that pure analytic analyses cannot cover all multi-physical aspects of such a complex device ...
University of Kassel, Kassel, Germany
In order to design an RF MEMS based device, it is beneficial to have information concerning mechanical behavior. For model verification purpose, solution offered by simulation software equipped with predefined physics application is one valuable way to provide initial reference. To avoid unwanted particular total strain in RF MEMS structures, a compensation layer can be utilized. When the number ...
Modeling Electric Fields in Slit Capillary Array Fluidic Actuators with Complex Electrode Geometries
J. Frey, A. Droitcour, D. Laser
Wave 80 Biosciences, San Francisco, CA, USA
With their small size, low manufacturing cost, fast transient response, and capacity to generate fluid power directly from small electrical power sources, microdevices incorporating electroosmostic flow (EOF) have wide-ranging applications, including newly developed high-performance bioassay systems suitable for use in resource-limited settings. We report on a class of EOF-based devices called ...
H. Schweiger, T. Göstenkors, R. Bau, D. Zielke
Dept. Engineering Sciences and Mathematics, University of Applied Sciences Bielefeld, Bielefeld, Germany
In this paper we want to figure out the development of a capacitive acceleration-sensor system with the FEM-Method. The sensor-system is in the position to detect accelerations in the range of ±20 g. Furthermore the sensor-element contains a printed RF-inductance, which is used for contactless data transfer. On the one hand the simulation of the L-C-oscillating circuit using the RF Module of ...
V. Vijayalakshmi, K. C. Devi
PSG College of Technology, Coimbatore, Tamil Nadu, India
In this work, a bimetallic strip based thermal sensor was designed using MEMS module of COMSOL Multiphysics® software to monitor the temperature rise in insulating oil which was used as coolant in transformers. The bimetallic strip was designed with different shapes such as cylindrical, rectangle, square & conical and different compositions such as Al/Steel Alloy and Fe/Cu which can withstand ...
P. Saikumar , Z. C. Alex , D. Rajapan ,
 VIT University, Vellore, Tamilnadu, India.
 National Institute of Ocean Technology (NIOT), Pallikaranai, Chennai, Tamilnadu, India
A flow sensor based on calorimetric principle is designed using COMSOL Multiphysics® software. The sensor is capable of measuring the velocity from 0 to 1 m/s with a resolution of 0.001m/s. The system works with intrusive type mechanism in which the fluid flows across the sensor and interacts with heating element and sensing unit. Temperature gradient measured across the inlet and outlet sensing ...