S. Nelson, and M. Guvench
University of Southern Maine, Gorham, Maine, USA
COMSOL Multiphysics is employed to model, simulate and predict the performance of a high Q, in-plane rotational resonating MEMS sensor. The resonating sensor disk is driven by thermal expansion and contraction of the support tethers due to AC joule heating. The resonant frequency is sensed by stationary contacts. For cost reduction, the relatively simple, low cost SOIMUMPS fabrication process is ...
Variable Capacitance And Pull-In Voltage Analysis Of Electrically Actuated Meander-Suspended Superconducting MEMS
N. AlCheikh, P. Xavier, J.M. Duchamp, C.H. Boucher, and K. Schuster
Institute of Microelectronics, Electromagnetism and Photonics (IMEP-LAHC), Minatec, Grenoble, France
Institute of Millimetric Radio Astronomy (IRAM), Grenoble, France
Variable capacitors between the fF and pF range are very interesting for high frequency applications like variable filters, resonators, etc. For radio astronomy applications variable capacitors, realized by electrostatically actuated, micromechanical Meanders-suspended bridges (MEMS) made of superconducting Niobium, have been measured to find C(V). A non plane capacitance behavior have been ...
L.B.M. Silva, E.J.P. Santos
Laboratory for Devices and Nanostructures, Electronics and Systems Department, Universidade Federal de Pernambuco, Recife, PE, Brasil
Transducer optimization is a key aspect for successful development and deployment of advanced sensors, especially when designing 3D structures for harsh environments. For piezoelectric transducers, plate thickness determines the operating frequency of the resonator, which is frequently tuned in the shear thickness vibration mode. Quartz has been the material of choice for the fabrication of ...
Shambhu Singh, Dr. N N Sharma
Birla Institute of Technology and science, Pilani, Rajasthan, India
A solid state Piezoelectric Micro Machined Modal Gyroscope is a vibratory type of gyroscope which sense the motion by voltage induced due to Coriolis force. It utilizes natural frequency of the structure to maximize the displacements and hence maximizing the induced voltage signals for sensing.The mode suitable for gyroscopic motion is 9th mode, which was found to be vibrating at 350.217 kHz. A ...
V. Nivethitha, S. P. Rakavi, K. C. Devi
PSG College Of Technology, Coimbatore, Tamil Nadu, India
In this work, a piezoelectric tactile sensor will be designed and simulated using COMSOL Multiphysics®. The sensor is designed in order to assess the pressure exerted on the human body while the robotic surgery is performed. The sensor consists of a rigid and compliant cylindrical element. A circular PDMS (Polydimethylsiloxane) film is sandwiched between the rigid cylinder and the base plate to ...
O. Sardan, D. Petersen, O. Sigmund, and P. Boggild
DTU Nanotech, Denmark
DTU Mechanical Engineering, Denmark
In this work, electrothermal microgrippers designed using topology optimization are modeled. The microgrippers are composed of two 5 μm-thick polysilicon actuators facing each other. The gap between the actuators are 2 μm in the initial state and the microgrippers are able to both fully close and further open this gap. The operation principle of the actuators is quite similar to that of a ...
R. Dufour , C. Wu, F. Bendriaa, V. Thomy, and V. Senez
BioMEMS Group, IEMN, University of Lille Nord de France, Villeneuve d’Ascq, France
This paper presents an Analog to Digital Microfluidic Converter (ADMC) using passive valves and enabling the conversion of a continuous liquid flow into droplets for Electro-Wetting On Dielectric (EWOD) actuation. Valves calibration, geometry characteristics and losses reduction have been optimized using microfluidic application mode of COMSOL Multiphysics®.
S. Rabbani, P.K. Rathore, G. Ghosh, and B.S. Panwar
Indian Institute of Technology Delhi, New Delhi, India
In this paper, a piezoelectric cantilever is investigated using finite element analysis made possible by COMSOL Multiphysics for the generation of electrical energy. A micro power generator was designed to convert mechanical vibrations present in the environment to electrical power. The model was studied for different cantilever dimensions. The load resistor was optimized for obtaining maximum ...
K. PraveenKumar, P. Suresh, K. Subash, M. Alagappan, A. Gupta
PSG College of Technology, Coimbatore, Tamil Nadu, India.
In this work, we present the performance analysis of novel micro machined Piezoresistive fluid flow pressure sensor using COMSOL Multiphysics. The principle of the sensing mechanism is based on the deflection of four sensing layers embedded on a thin membrane. The fluid passes through the layer causes the deflection of the sensing layer which measures the pressure of the fluid. The following ...
Dynamic Observation of Magnetic Particles in Continuous Flow Devices by Tunneling Magnetoresistance Sensors
A. Weddemann, A. Auge, F. Wittbracht, C. Albon, and A. Hütten
Department of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
Dynamic measurement of magnetic particles in continuous flow devices is made very difficult by the limitations imposed by the sensors themselves. Thus, certain sensor layouts are restricted to either number sensitive or spatial resolutive measurements of magnetic particles. We investigate different new strategies to increase the detection threshold and introduce designs accomplishing both: ...