S. Prabhu , Nagbhushan ,
 Nitte Meenakshi Institute of Technology, Bengaluru, Karnataka, India
Silicon based MEMS have wide applications in under water sensors. This work aims one such applications, hydrophone. Hydrophone detects the pressure variations of acoustic signals and noise in the water and produces an output voltage proportional to the pressure. Here the attempt is made to design and simulate MEMS based underwater acoustic sensor whose working is based on piezoresistive physics. ...
M. A. Shah , F. Iqbal , B. L. Lee ,
 Korea University of Technology and Education, Cheonan, Chungcheong, South Korea
A dual axis MEMS seismometer targeted for building monitoring system has been simulated for a full scale of ±5g acceleration. The design uses the capacitive effect for vibration sensing. This comb drive capacitive MEMS seismometer consists of 8 springs with two proof masses. The device is very low cross axis sensitive (almost negligible cross axis error). The cross axis sensitivity of x-axis is ...
Vivek , S. Baranwal , A. Bindal , R. Mukherjee , A. Atta 
IIT Kharagpur, West Bengal, India
Hollow microstructures find numerous applications in microsystems, bioMEMS and microfluidic systems . Consequently, one-step fabrication process of hollow polymeric microstructures by external electric field along with capillary forces, termed as electric field- assisted capillarity (EFAC), has attracted the attention of researchers over conventional methods . Localized higher voltage ...
B. Cahill, A. Giannitsis, G. Gastrock, M. Min[1,2], and D. Beckmann
Institut für Bioprozess- und Analysenmesstechnik e.V., Heiligenstadt, Germany
 Department of Electronics, Tallinn University of Technology, Tallinn, Estonia
Electrowetting occurs with the electrical control of the surface wetting properties through the application of an electric potential. A simulation of electrowetting driven droplet dynamics is performed using the COMSOL Multiphysics level-set method for a sessile droplet and for a droplet in a microchannel. The response of the drop to a step voltage is studied. The contact angle at one edge of ...
A. Haidary, P. Grütter, Y. Miyahara
Physics Department, McGill University, Montreal, QC, Canada
A wide variety of near-field optical phenomena such as apertureless near-field scanning microscopy (ANSM) at optical and terahertz (THz) regimes and surface enhanced Raman scattering relies on the electric field enhancement at the end of a sharp tip. Achieving and controlling this electric field enhancement is a key challenge for a wide range of applications such as surface modification, data ...
Primary Current Distribution Model for Electrochemical Etching of Silicon through a Circular Opening
A. Ivanov , U. Mescheder ,
 Hochschule Furtwangen University, Furtwangen im Schwarzwald, Germany
Primary current distribution model for anodization of low-doped p-type silicon through a circular opening in frontside insulating mask is developed. The model is applied in two regimes of the process – pore formation and electropolishing – by definition of current density dependent functions of porosity and dissolution valence based on experimental results. As found also experimentally, ...
A. Arevalo, I. G. Foulds
Computer, Electrical and Mathematical Sciences and Engineering Division (CEMSE), King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
School of Engineering, Okanagan Campus, The University of British Columbia, Vancouver, BC, Canada
Joule heating is simulated in COMSOL Multiphysics® software for the electro-thermal micro actuator. The aim is to choose the optimal design parameters to get the largest possible in-plane displacement. The comparison between the different possible configurations will reveal the optimal parameters for the longest displacement. Our current micro fabrication process allows the actuator to use ...
S. Dixit, R. C. Jain
Jaypee Institute of Information Technology, Noida, Uttar Pradesh, India
Surface Acoustic Waves (SAW) is the acoustic wave that propagates along the surface of the substrate with amplitude decaying exponentially away from the surface. A basic SAW device consists of two IDT’s on a piezoelectric substrate such as quartz. Surface Acoustic Wave can be generated by application of a voltage to an IDT deposited on the surface of a piezoelectric substrate. The ...
R. Langkemper , R. Külls , J. Wilde , S. Nau , S. Schopferer ,
 Fraunhofer-Institut für Kurzzeitdynamik, Ernst-Mach-Institut, EMI, Freiburg, Germany
 Albert-Ludwigs-Universität Freiburg, Institut für Mikrosystemtechnik, Freiburg, Germany
Acceleration is an important quantity to be measured in high-speed dynamics. A new piezoresistive sensor for the measurement of high-amplitude, short-duration transient accelerations of up to 100,000 g has been developed at the Fraunhofer EMI. Its figure of merit (sensitivity x resonance frequency²) is about one order of magnitude higher than that of comparable state-of-the-art sensors. ...
H. Ghosh , C. Roychaudhuri ,
 Indian Institute of Engineering Science and Technology (IIEST), Shibpur, Howrah, West Bengal, India
This paper explores surface charge modulated ionic conductance of closed solid-state nanopores for explaining significant nonlinear length dependent variation in ionic current in such nanopore biosensors with a view to design improved sensors without increasing fabrication cost for biomolecule detection. Although extensive work has been done in modeling open pore conductance, closed nanopores ...